EP 1081387 B1 20090318 - Vacuum pump
Title (en)
Vacuum pump
Title (de)
Vakuumpumpe
Title (fr)
Pompe à vide
Publication
Application
Priority
DE 19942410 A 19990906
Abstract (en)
[origin: EP1081387A2] The pump has several pump units (14,16,18) in a casing (1) with gas inlet (2) and outlet (4) openings. The pump units are formed from rotating and fixed gas supply components. The rotating components are fixed on a shaft (6) with a drive arrangement (8) and bearing elements (10,12). The fixed components are fixed to the casing. At least one pump unit has several parallel molecular pump stages (16a) in the style of Gaede pumps. The molecular pump stages are arranged one behind the other axially and are connected by common connection channels (34), for a parallel supply.
IPC 8 full level
F04D 19/04 (2006.01); F04D 17/16 (2006.01)
CPC (source: EP US)
F04D 17/168 (2013.01 - EP US); F04D 19/046 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
EP 1081387 A2 20010307; EP 1081387 A3 20020417; EP 1081387 B1 20090318; AT E426098 T1 20090415; DE 19942410 A1 20010308; DE 50015596 D1 20090430; JP 2001090690 A 20010403; US 6464451 B1 20021015
DOCDB simple family (application)
EP 00117868 A 20000819; AT 00117868 T 20000819; DE 19942410 A 19990906; DE 50015596 T 20000819; JP 2000268621 A 20000905; US 65598100 A 20000906