Global Patent Index - EP 1082755 A1

EP 1082755 A1 2001-03-14 - A WAFER BUFFER STATION AND A METHOD FOR A PER-WAFER TRANSFER BETWEEN WORK STATIONS

Title (en)

A WAFER BUFFER STATION AND A METHOD FOR A PER-WAFER TRANSFER BETWEEN WORK STATIONS

Title (de)

HALBLEITERSCHEIBEN-BUFFERSTATION UND VERFAHREN ZUM EINZELTRANSPORT VON HALBLEITERPLÄTTCHEN ZWISCHEN ARBEITSPLÄTZEN

Title (fr)

POSTE TAMPON POUR PLAQUETTES ET PROCEDE DE TRANSFERT PLAQUETTE PAR PLAQUETTE ENTRE DES POSTES D'USINAGE

Publication

EP 1082755 A1 (EN)

Application

EP 99921607 A

Priority

  • US 9909602 W
  • US 8022298 A

Abstract (en)

[origin: WO9960614A1] A buffer station is disclosed, for a "per wafer" transfer of wafers between work stations. The wafers are retrieved from the pod by a track robot at a first work station and are processed. When the processing at the first work station is completed, the track robot takes the wafer and, rather than returning it to the pod, places the wafer in the buffer station. When the second work station is ready to accept the wafer, its track robot retrieves the wafer from the buffer station and inserts it into the second work station for processing. When processing is completed at the second work station, the track robot inserts the wafer into a pod located at the second work station.

IPC 1-7 (main, further and additional classification)

H01L 21/00

IPC 8 full level (invention and additional information)

B65G 49/07 (2006.01); H01L 21/00 (2006.01); H01L 21/02 (2006.01); H01L 21/677 (2006.01)

CPC (invention and additional information)

H01L 21/67778 (2013.01); H01L 21/67161 (2013.01); H01L 21/67745 (2013.01)

Citation (search report)

See references of WO 9960614A1

Designated contracting state (EPC)

CH DE GB LI NL

EPO simple patent family

WO 9960614 A1 19991125; EP 1082755 A1 20010314; JP 2002516485 A 20020604

INPADOC legal status


2005-01-19 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20040714

2004-04-21 [17Q] FIRST EXAMINATION REPORT

- Effective date: 20040303

2001-03-14 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20001218

2001-03-14 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): CH DE GB LI NL