EP 1082755 A1 20010314 - A WAFER BUFFER STATION AND A METHOD FOR A PER-WAFER TRANSFER BETWEEN WORK STATIONS
Title (en)
A WAFER BUFFER STATION AND A METHOD FOR A PER-WAFER TRANSFER BETWEEN WORK STATIONS
Title (de)
HALBLEITERSCHEIBEN-BUFFERSTATION UND VERFAHREN ZUM EINZELTRANSPORT VON HALBLEITERPLÄTTCHEN ZWISCHEN ARBEITSPLÄTZEN
Title (fr)
POSTE TAMPON POUR PLAQUETTES ET PROCEDE DE TRANSFERT PLAQUETTE PAR PLAQUETTE ENTRE DES POSTES D'USINAGE
Publication
Application
Priority
- US 9909602 W 19990430
- US 8022298 A 19980518
Abstract (en)
[origin: WO9960614A1] A buffer station is disclosed, for a "per wafer" transfer of wafers between work stations. The wafers are retrieved from the pod by a track robot at a first work station and are processed. When the processing at the first work station is completed, the track robot takes the wafer and, rather than returning it to the pod, places the wafer in the buffer station. When the second work station is ready to accept the wafer, its track robot retrieves the wafer from the buffer station and inserts it into the second work station for processing. When processing is completed at the second work station, the track robot inserts the wafer into a pod located at the second work station.
IPC 1-7
IPC 8 full level
B65G 49/07 (2006.01); H01L 21/00 (2006.01); H01L 21/02 (2006.01); H01L 21/677 (2006.01)
CPC (source: EP KR)
H01L 21/00 (2013.01 - KR); H01L 21/67161 (2013.01 - EP); H01L 21/67745 (2013.01 - EP); H01L 21/67778 (2013.01 - EP)
Citation (search report)
See references of WO 9960614A1
Designated contracting state (EPC)
CH DE GB LI NL
DOCDB simple family (publication)
WO 9960614 A1 19991125; EP 1082755 A1 20010314; JP 2002516485 A 20020604; KR 20010043705 A 20010525
DOCDB simple family (application)
US 9909602 W 19990430; EP 99921607 A 19990430; JP 2000550142 A 19990430; KR 20007012929 A 20001117