EP 1083609 A1 20010314 - Method of fabricating thermoelectric sensor
Title (en)
Method of fabricating thermoelectric sensor
Title (de)
Verfahren zum Herstellen eines thermoelektrischen Sensors
Title (fr)
Procédé pour la fabrication d'un senseur thermoélectrique
Publication
Application
Priority
- EP 99117879 A 19990910
- US 39257499 A 19990909
Abstract (en)
A thermoelectric sensor device is disclosed consisting of polysilicon, titanium or AlSiCu as the thermocouple of material for thermoelectric sensor device. The features of the present process are: Selecting a material such as aluminum, titanium, aluminum alloy or titanium alloy with lower thermal conductivity coefficient as thermocouple element line and making use of zigzag structure with thermocouple element line, and increasing the length of thermocouple element line. Employing front side Si bulk etching technique to etch the silicon substrate, which is under the device and empty of silicon substrate, so as to reduce the superficial measure of thermoelectric sensor module and increase the throughout of the silicon wafer. Simultaneously, fabricating a resistor to treat as a heater on the membrane for adjusting the device. <IMAGE>
IPC 1-7
IPC 8 full level
G01J 5/12 (2006.01); H10N 10/01 (2023.01); H10N 10/17 (2023.01)
CPC (source: EP US)
G01J 5/12 (2013.01 - EP US); H10N 10/01 (2023.02 - EP US); H10N 10/17 (2023.02 - EP US)
Citation (search report)
- [YA] WO 9416464 A1 19940721 - KINARD JOSEPH R [US], et al
- [A] FR 2398389 A1 19790216 - SIEMENS AG [DE]
- [XA] PATENT ABSTRACTS OF JAPAN vol. 014, no. 498 (P - 1124) 30 October 1990 (1990-10-30)
- [YA] MULLER M ET AL: "A FULLY CMOS-COMPATIBLE INFRARED SENSOR FABRICATED ON SIMOX SUBSTRATES", SENSORS AND ACTUATORS A,CH,ELSEVIER SEQUOIA S.A., LAUSANNE, vol. A42, no. 1/03, 15 April 1994 (1994-04-15), pages 538 - 541, XP000449977, ISSN: 0924-4247
- [DA] T. AKIN ET AL: "An integrated thermopile structure with high responsivity using any standard CMOS process", SENSORS AND ACTUATORS, vol. a66, 1998, Lausanne,CH, pages 218 - 224, XP002130215
- [DA] H. BALTES: "CMOS as sensor technology", SENSORS AND ACTUATORS, vol. A37-38, 1993, Lausanne,CH, pages 51 - 56, XP002130216
- [A] VAN HERWAARDEN A W ET AL: "INTEGRATED THERMOPILE SENSORS", SENSORS AND ACTUATORS A,CH,ELSEVIER SEQUOIA S.A., LAUSANNE, vol. A22, no. 1 / 03, 1 March 1990 (1990-03-01), pages 621 - 630, XP000358506, ISSN: 0924-4247
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
DOCDB simple family (application)
EP 99117879 A 19990910; US 39257499 A 19990909