EP 1084378 A1 20010321 - METHODS AND APPARATUS FOR CONFOCAL INTERFERENCE MICROSCOPY USING WAVENUMBER DOMAIN REFLECTOMETRY AND BACKGROUND AMPLITUDE REDUCTION AND COMPENSATION
Title (en)
METHODS AND APPARATUS FOR CONFOCAL INTERFERENCE MICROSCOPY USING WAVENUMBER DOMAIN REFLECTOMETRY AND BACKGROUND AMPLITUDE REDUCTION AND COMPENSATION
Title (de)
VERFAHREN UND APPARATEN FÜR KONFOKAL-INTERFERENZ-MIKROSKOPIE MITTELS WELLENNUMMERGEBIETSREFLEKTOMETRIE UND REDUKTION UND KOMPENSATION DES HINTERGRUNDS
Title (fr)
PROCEDES ET DISPOSITIFS DE MICROSCOPIE CONFOCALE D'INTERFERENCES AU MOYEN D'UNE REFLECTOMETRIE A DOMAINE DE NOMBRE D'ONDES ET D'UNE REDUCTION ET COMPENSATION D'AMPLITUDE D'ARRIERE-PLAN
Publication
Application
Priority
- US 9911601 W 19990526
- US 8910598 A 19980602
- US 12505799 P 19990318
Abstract (en)
[origin: WO9963300A1] An in-focus image of a region within and/or on an object (112) is discriminated from an out-of-focus image so as to reduce errors in image information of the object by producing a probe beam (P22B) and a reference beam (R22B) from a broadband point source (90), producing antisymmetric spatial properties in the reference beam (R32B), converting the probe beam to a beam focused to a line in the region, producing an in-focus return probe beam, and producing antisymmetric spatial properties in the in-focus return probe beam (P32B). Then the in-focus return probe beam is spatially filtered (P42A) and passed through a dispersal element to focus it (P42C) to a line in a detector plane of a detector system (114). The reference beam is spatially filtered (R42A) and passed through a dispersal element to focus it (R42C) to a line in-the-detector-plane. A beam from an out-of-focus image point is spatially filtered (P62A) and passed through the dispersal element (P62C). The in-the-detector-plane spatially filtered reference beam (R42C) is interfered with the in-the-detector-plane spatially filtered beam from the out-of-focus image point (P62C) and the in-the-detector-plane spatially filtered in-focus return probe beam (P42C). An amplitude of the spatially filtered in-focus return probe beam (P42C) is detected as an interference term between the in-the-detector-plane spatially filtered reference beam, and the in-the-detector-plane spatially filtered (R42C) in-focus return probe beam (P42C) by means of the detector system (114). An amplitude of an interference term between an amplitude of the in-the-detector-plane spatially filtered out-of-focus image beam (P62C) and an amplitude of the in-the-detector-plane spatially filtered reference beam (R42C) is thereby substantially reduced, and reduces errors in data produced by the detector system (114) to represent the image information of the object.
IPC 1-7
IPC 8 full level
G01B 9/02 (2006.01); G01B 9/04 (2006.01); G01B 11/00 (2006.01); G01J 3/51 (2006.01); G01N 21/17 (2006.01); G01N 21/27 (2006.01); G02B 21/00 (2006.01); G03F 9/00 (2006.01); G11B 7/005 (2006.01); G11B 7/0065 (2006.01); G11B 7/14 (2006.01); H01L 21/027 (2006.01)
CPC (source: EP)
G01B 9/02027 (2013.01); G01B 9/02042 (2013.01); G01B 9/04 (2013.01); G02B 21/0056 (2013.01); G02B 21/006 (2013.01); G02B 21/0068 (2013.01); G02B 21/008 (2013.01); G11B 7/005 (2013.01); G11B 7/14 (2013.01)
Citation (search report)
See references of WO 9963300A1
Designated contracting state (EPC)
CH DE FR GB LI NL SE
DOCDB simple family (publication)
WO 9963300 A1 19991209; CN 1309759 A 20010822; EP 1084378 A1 20010321; JP 2002517710 A 20020618
DOCDB simple family (application)
US 9911601 W 19990526; CN 99808770 A 19990526; EP 99928339 A 19990526; JP 2000552462 A 19990526