Global Patent Index - EP 1084509 A1

EP 1084509 A1 2001-03-21 - BATCH END EFFECTOR FOR SEMICONDUCTOR WAFER HANDLING

Title (en)

BATCH END EFFECTOR FOR SEMICONDUCTOR WAFER HANDLING

Title (de)

MEHRFACH-GREIFORGAN FÜR HALBLEITERWAFERBEHANDLUNG

Title (fr)

EFFECTEUR TERMINAL DE LOT POUR LA MANIPULATION DE PLAQUETTES SEMI-CONDUCTRICES

Publication

EP 1084509 A1 (EN)

Application

EP 99921826 A

Priority

  • US 9910194 W
  • US 8555398 A

Abstract (en)

[origin: WO9962107A1] A wafer robot includes a first end effector and a second end effector, each having one or more wafer holders. A robot arm assembly moves the first and second end effectors to perform separate operations. A wafer carrier may be loaded or unloaded with one or more operations of the first end effector and one or more operations of the second end effector. The wafer robot may include a vacuum system for vacuum gripping of wafers on the wafer holders. The end effectors may further include vacuum sensors for sensing the presence of a wafer on each of the wafer holders.

IPC 1-7 (main, further and additional classification)

H01L 21/00

IPC 8 full level (invention and additional information)

H01L 21/00 (2006.01); H01L 21/677 (2006.01); H01L 21/683 (2006.01)

CPC (invention and additional information)

H01L 21/6838 (2013.01); H01L 21/67766 (2013.01); H01L 21/67781 (2013.01)

Citation (search report)

See references of WO 9962107A1

Designated contracting state (EPC)

DE FR GB IE IT

EPO simple patent family

WO 9962107 A1 19991202; EP 1084509 A1 20010321; JP 2002517088 A 20020611; TW 451382 B 20010821

INPADOC legal status


2005-01-19 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20040714

2004-04-21 [17Q] FIRST EXAMINATION REPORT

- Effective date: 20040303

2001-03-21 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20001030

2001-03-21 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): DE FR GB IE IT