EP 1084509 A1 20010321 - BATCH END EFFECTOR FOR SEMICONDUCTOR WAFER HANDLING
Title (en)
BATCH END EFFECTOR FOR SEMICONDUCTOR WAFER HANDLING
Title (de)
MEHRFACH-GREIFORGAN FÜR HALBLEITERWAFERBEHANDLUNG
Title (fr)
EFFECTEUR TERMINAL DE LOT POUR LA MANIPULATION DE PLAQUETTES SEMI-CONDUCTRICES
Publication
Application
Priority
- US 9910194 W 19990510
- US 8555398 A 19980527
Abstract (en)
[origin: WO9962107A1] A wafer robot includes a first end effector and a second end effector, each having one or more wafer holders. A robot arm assembly moves the first and second end effectors to perform separate operations. A wafer carrier may be loaded or unloaded with one or more operations of the first end effector and one or more operations of the second end effector. The wafer robot may include a vacuum system for vacuum gripping of wafers on the wafer holders. The end effectors may further include vacuum sensors for sensing the presence of a wafer on each of the wafer holders.
IPC 1-7
IPC 8 full level
H01L 21/00 (2006.01); H01L 21/677 (2006.01); H01L 21/683 (2006.01)
CPC (source: EP KR)
H01L 21/00 (2013.01 - KR); H01L 21/67766 (2013.01 - EP); H01L 21/67781 (2013.01 - EP); H01L 21/6838 (2013.01 - EP)
Citation (search report)
See references of WO 9962107A1
Designated contracting state (EPC)
DE FR GB IE IT
DOCDB simple family (publication)
WO 9962107 A1 19991202; EP 1084509 A1 20010321; JP 2002517088 A 20020611; KR 20010043834 A 20010525; TW 451382 B 20010821
DOCDB simple family (application)
US 9910194 W 19990510; EP 99921826 A 19990510; JP 2000551426 A 19990510; KR 20007013287 A 20001125; TW 88107908 A 19990515