Global patent index - EP 1086260 A1

EP 1086260 A1 2001-03-28 - OXYGEN-ARGON GAS MIXTURE FOR PRECLEANING IN VACUUM PROCESSING SYSTEM

Title (en)

OXYGEN-ARGON GAS MIXTURE FOR PRECLEANING IN VACUUM PROCESSING SYSTEM

Title (de)

SAUERSTOFF-ARGON GASGEMISCH ZUR VORREINIGUNG EINES VAKUUMPROZESSSYSTEMS

Title (fr)

MELANGE DE GAZ ARGON-OXYGENE PERMETTANT UN PRE-NETTOYAGE DANS UN SYSTEME DE TRAITEMENT SOUS VIDE

Publication

EP 1086260 A1 (EN)

Application

EP 99921909 A

Priority

  • US 9910392 W
  • US 7658998 A

Abstract (en)

[origin: WO9958739A1] A method for cleaning, or pre-cleaning, a process objet, such as a substrate, uses a process gas, such as argon, mixed with a quantity of oxygen. The process gas sputter etches material from the surface of the process object to clean or remove oxides, or other contaminants, therefrom. The oxygen reacts with the etched material to form stoichiometrically balanced compounds that deposit in a smooth film on a process kit. The process kit is periodically removed and replaced after a predetermined number of process objects have been processed, or cleaned.

IPC 1-7 (main, further and additional classification)

C23C 16/44; B08B 7/00; C23C 14/02; C23C 16/02; H01J 37/32; H01L 21/00

IPC 8 full level (invention and additional information)

B08B 7/00 (2006.01); C23C 14/02 (2006.01); C23C 16/02 (2006.01); C23C 16/44 (2006.01); H01J 37/32 (2006.01); H01L 21/302 (2006.01); H01L 21/3065 (2006.01); H01L 21/3213 (2006.01)

CPC (invention and additional information)

C23C 16/0245 (2013.01); C23C 14/022 (2013.01); H01J 2237/335 (2013.01); H01L 21/32136 (2013.01)

Citation (search report)

See references of WO 9958739A1

Designated contracting state (EPC)

BE DE GB NL

EPO simple patent family

WO 9958739 A1 19991118; EP 1086260 A1 20010328; JP 2002514831 A 20020521

INPADOC legal status

2004-03-24 [18D] DEEMED TO BE WITHDRAWN

- Ref Legal Event Code: 18D

- Effective date: 20030919

2003-06-25 [17Q] FIRST EXAMINATION REPORT

- Ref Legal Event Code: 17Q

- Effective date: 20030508

2001-03-28 [17P] REQUEST FOR EXAMINATION FILED

- Ref Legal Event Code: 17P

- Effective date: 20001212

2001-03-28 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): BE DE GB NL