Global patent index - EP 1086404 A1

EP 1086404 A1 2001-03-28 - CROSSED GRATING PHOTONIC CRYSTALS AND MULTIPLE EXPOSURE PROCESSES FOR MAKING THEM

Title (en)

CROSSED GRATING PHOTONIC CRYSTALS AND MULTIPLE EXPOSURE PROCESSES FOR MAKING THEM

Title (de)

PHOTONISCHE KRISTALLE MIT GEKREUZTEN GITTERN UND MEHRFACH-BELICHTUNGSPROZESSE ZU DEREN HERSTELLUNG

Title (fr)

CRISTAUX PHOTONIQUES EN RESEAU CROISE ET MULTIPLES PROCESSUS D'EXPOSITION AUX FINS DE LEUR FABRICATION

Publication

EP 1086404 A1 (EN)

Application

EP 99927149 A

Priority

  • EP 99927149 A
  • EP 98401369 A
  • US 9912202 W

Abstract (en)

[origin: EP0964305A1] Disclosed is a method of making a photonic crystal having a period suitable for use with light wavelengths in the range of about 800 nm to 1800 nm. The method includes the use of a thick photoresist on a substrate in which the photoresist is exposed to interference fringes formed from four non-coplanar laser beams. A masking technique, which makes use of backside illumination of the photoresist, is described in a method of making a photonic crystal which is a passive optical component. The types of passive optical components which can be made include a waveguide, a light cavity, as well as couplers, splitters, and wavelength division multiplexers. <IMAGE>

IPC 1-7 (main, further and additional classification)

G03F 7/22; G03H 1/28

IPC 8 full level (invention and additional information)

G02B 6/12 (2006.01); G02B 1/02 (2006.01); G02B 6/122 (2006.01); G03F 7/00 (2006.01); G03F 7/20 (2006.01); G03F 7/22 (2006.01); G03H 1/28 (2006.01)

CPC (invention and additional information)

B82Y 20/00 (2013.01); G02B 6/1225 (2013.01); G03F 7/00 (2013.01); G03F 7/001 (2013.01); G03F 7/2022 (2013.01); G03F 7/70408 (2013.01)

Citation (search report)

See references of WO 9964933A1

Designated contracting state (EPC)

DE FR GB IT

EPO simple patent family

EP 0964305 A1 19991215; AU 4412699 A 19991230; CA 2334692 A1 19991216; CN 1329727 A 20020102; EP 1086404 A1 20010328; JP 2002517803 A 20020618; TW 500974 B 20020901; WO 9964933 A1 19991216

INPADOC legal status

2004-09-29 [18D] DEEMED TO BE WITHDRAWN

- Ref Legal Event Code: 18D

- Effective date: 20040101

2001-03-28 [17P] REQUEST FOR EXAMINATION FILED

- Ref Legal Event Code: 17P

- Effective date: 20001201

2001-03-28 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): DE FR GB IT