EP 1086404 A1 20010328 - CROSSED GRATING PHOTONIC CRYSTALS AND MULTIPLE EXPOSURE PROCESSES FOR MAKING THEM
Title (en)
CROSSED GRATING PHOTONIC CRYSTALS AND MULTIPLE EXPOSURE PROCESSES FOR MAKING THEM
Title (de)
PHOTONISCHE KRISTALLE MIT GEKREUZTEN GITTERN UND MEHRFACH-BELICHTUNGSPROZESSE ZU DEREN HERSTELLUNG
Title (fr)
CRISTAUX PHOTONIQUES EN RESEAU CROISE ET MULTIPLES PROCESSUS D'EXPOSITION AUX FINS DE LEUR FABRICATION
Publication
Application
Priority
- EP 99927149 A 19990602
- EP 98401369 A 19980608
- US 9912202 W 19990602
Abstract (en)
[origin: EP0964305A1] Disclosed is a method of making a photonic crystal having a period suitable for use with light wavelengths in the range of about 800 nm to 1800 nm. The method includes the use of a thick photoresist on a substrate in which the photoresist is exposed to interference fringes formed from four non-coplanar laser beams. A masking technique, which makes use of backside illumination of the photoresist, is described in a method of making a photonic crystal which is a passive optical component. The types of passive optical components which can be made include a waveguide, a light cavity, as well as couplers, splitters, and wavelength division multiplexers. <IMAGE>
IPC 1-7
IPC 8 full level
G02B 6/12 (2006.01); G02B 1/02 (2006.01); G02B 6/122 (2006.01); G03F 7/00 (2006.01); G03F 7/20 (2006.01); G03F 7/22 (2006.01); G03H 1/28 (2006.01)
CPC (source: EP)
B82Y 20/00 (2013.01); G02B 6/1225 (2013.01); G03F 7/00 (2013.01); G03F 7/001 (2013.01); G03F 7/2022 (2013.01); G03F 7/70408 (2013.01)
Citation (search report)
See references of WO 9964933A1
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
EP 0964305 A1 19991215; AU 4412699 A 19991230; CA 2334692 A1 19991216; CN 1329727 A 20020102; EP 1086404 A1 20010328; JP 2002517803 A 20020618; TW 500974 B 20020901; WO 9964933 A1 19991216
DOCDB simple family (application)
EP 98401369 A 19980608; AU 4412699 A 19990602; CA 2334692 A 19990602; CN 99814054 A 19990602; EP 99927149 A 19990602; JP 2000553870 A 19990602; TW 88113597 A 19990806; US 9912202 W 19990602