Global Patent Index - EP 1086482 A1

EP 1086482 A1 2001-03-28 - GAS DISTRIBUTION SYSTEM

Title (en)

GAS DISTRIBUTION SYSTEM

Title (de)

GASVERTEILUNGSVORRICHTUNG

Title (fr)

UNITE DE REPARTITION DE GAZ

Publication

EP 1086482 A1 (EN)

Application

EP 99930228 A

Priority

  • JP 16533998 A
  • US 9913308 W
  • US 17084298 A

Abstract (en)

[origin: WO9965057A1] The present invention generally provides a substrate processing chamber (14) having a gas distributor (54) that provides a uniform distribution of a gas concentration within the chamber. More particularly, the present invention provides an apparatus for distributing a process gas within a processing chamber that provides a uniform distribution of gas concentration within the processing chamber. Another aspect of the present invention provides for such an apparatus for gas distribution that can be used in CVD, PVD and etching chambers. The present invention generally provides an apparatus for distributing gas within a substrate processing chamber comprising a gas distributor (54) made of gas permeable material having a conduit (50) disposed within the gas distributor.

IPC 1-7 (main, further and additional classification)

H01J 37/34; C23C 14/34; C23C 14/56; C23C 16/44

IPC 8 full level (invention and additional information)

C23C 14/34 (2006.01); C23C 14/56 (2006.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01); H01J 37/32 (2006.01)

CPC (invention and additional information)

C23C 16/4558 (2013.01); C23C 14/34 (2013.01); C23C 14/564 (2013.01); C23C 16/4401 (2013.01); H01J 37/3244 (2013.01); H01J 37/32449 (2013.01)

Citation (search report)

See references of WO 9965057A1

Designated contracting state (EPC)

BE DE GB IE NL

EPO simple patent family

WO 9965057 A1 19991216; EP 1086482 A1 20010328

INPADOC legal status


2003-07-09 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20030101

2001-03-28 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20010103

2001-03-28 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): BE DE GB IE NL