Global Patent Index - EP 1086485 A2

EP 1086485 A2 2001-03-28 - PROCESS AND MANUFACTURING TOOL ARCHITECTURE FOR USE IN THE MANUFACTURE OF ONE OR MORE METALLIZATION LEVELS ON A WORKPIECE

Title (en)

PROCESS AND MANUFACTURING TOOL ARCHITECTURE FOR USE IN THE MANUFACTURE OF ONE OR MORE METALLIZATION LEVELS ON A WORKPIECE

Title (de)

VERFAHREN UND ANORDNUNG EINER HERSTELLUNGSVORRICHTUNG ZUR VERWENDUNG IN DER HERSTELLUNG EINES ODER MEHRERER METALLISIERUNGSNIVEAUS AUF EINEM WERKSTÜCK

Title (fr)

OUTIL SERVANT A FABRIQUER UN OU PLUSIEURS NIVEAUX DE METALLISATION SUR UN COMPOSANT A SEMICONDUCTEUR ET PROCEDE CORRESPONDANT

Publication

EP 1086485 A2 (EN)

Application

EP 99922934 A

Priority

  • US 9910331 W
  • US 7656598 A
  • US 7669598 A
  • US 12823898 A

Abstract (en)

[origin: WO9959190A2] A semiconductor manufacturing tool configuration and corresponding process for applying one or more levels of interconnect metallization to a generally planar dielectric surface of a semiconductor workpiece with a minimal number of workpiece transfer operations between the tool sets is disclosed.

IPC 1-7 (main, further and additional classification)

H01L 21/00

IPC 8 full level (invention and additional information)

H01L 21/302 (2006.01); C12N 15/31 (2006.01); H01L 21/304 (2006.01); H01L 21/306 (2006.01); H01L 21/3065 (2006.01); H01L 21/3213 (2006.01); H01L 21/768 (2006.01); H01L 37/00 (2006.01)

CPC (invention and additional information)

H01L 21/76885 (2013.01); H01L 21/32134 (2013.01); H01L 21/76838 (2013.01); H01L 21/76825 (2013.01); H01L 21/76826 (2013.01)

Citation (search report)

See references of WO 9959190A3

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

EPO simple patent family

WO 9959190 A2 19991118; WO 9959190 A3 20000406; EP 1086485 A2 20010328; JP 2002515645 A 20020528; TW 494443 B 20020711

INPADOC legal status


2004-06-02 [18W] WITHDRAWN

- Effective date: 20040402

2001-03-28 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A2

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE