EP 1087264 A1 20010328 - Method of adjusting projection optical apparatus
Title (en)
Method of adjusting projection optical apparatus
Title (de)
Verfahren zur Einstellung einer optischen Projektionsvorrichtung
Title (fr)
Méthode d'ajustement d'un appareil de projection optique
Publication
Application
Priority
- EP 96100989 A 19960124
- JP 968795 A 19950125
Abstract (en)
This invention relates to an adjusting method for correcting the random component of distortion of a projection optical apparatus without performing complicated assembly and adjustment. This adjusting method has the first step of measuring the residual distortion component of a projection optical system having a predetermined target member (10) in its optical path, the second step of calculating, based on the measurement result of the first step, the surface shape of the target member (10) to cancel the residual distortion component, the third step of removing the target member from the projection optical system and machining the target member (10) so as to have the surface shape calculated in the second step, and the fourth step of inserting the target member (10) machined in the third step into the optical path of the projection optical system. <IMAGE>
IPC 1-7
IPC 8 full level
G02B 27/00 (2006.01); G03F 7/20 (2006.01); H01L 21/027 (2006.01)
CPC (source: EP KR US)
G02B 27/0025 (2013.01 - EP US); G02B 27/18 (2013.01 - KR); G03F 7/70308 (2013.01 - EP US); G03F 7/706 (2013.01 - EP US)
Citation (search report)
- [PX] EP 0660169 A1 19950628 - NIPPON KOGAKU KK [JP]
- [PX] US 5392119 A 19950221 - MCARTHUR BRUCE B [US], et al
- [X] US 5136413 A 19920804 - MACDONALD BRUCE G [US], et al
- [XY] GB 2138163 A 19841017 - CANON KK
- [Y] EP 0307726 A2 19890322 - MOTOROLA INC [US]
Designated contracting state (EPC)
DE FR GB IT NL
DOCDB simple family (publication)
EP 0724199 A1 19960731; EP 0724199 B1 20010725; DE 69614007 D1 20010830; DE 69614007 T2 20020321; EP 1087264 A1 20010328; JP 3893626 B2 20070314; JP H08203805 A 19960809; KR 100422330 B1 20040517; KR 960029825 A 19960817; US 2002113953 A1 20020822; US 2003174297 A1 20030918; US 2004196444 A1 20041007; US 6268903 B1 20010731; US 6377333 B1 20020423
DOCDB simple family (application)
EP 96100989 A 19960124; DE 69614007 T 19960124; EP 00126443 A 19960124; JP 968795 A 19950125; KR 19960001523 A 19960124; US 11411202 A 20020403; US 34608203 A 20030117; US 58101696 A 19960103; US 72195500 A 20001127; US 82915904 A 20040422