Global Patent Index - EP 1087848 A1

EP 1087848 A1 2001-04-04 - METHODS OF WET PROCESSING ELECTRONIC COMPONENTS USING PROCESS LIQUIDS WITH CONTROLLED LEVELS OF GASES

Title (en)

METHODS OF WET PROCESSING ELECTRONIC COMPONENTS USING PROCESS LIQUIDS WITH CONTROLLED LEVELS OF GASES

Title (de)

VERFAHREN ZUR NASSBEHANDLUNG ELEKTRONISCHER KOMPONENTEN UNTER BENUTZUNG VON PROZESSFLÜSSIGKEITEN MIT KONTROLLIERTEM GASGEHALT

Title (fr)

PROCEDE DE TRAITEMENT HUMIDE DE COMPOSANTS ELECTRONIQUES UTILISANT DES LIQUIDES DE TRAITEMENT A TENEURS EN GAZ CONTROLEES

Publication

EP 1087848 A1 (EN)

Application

EP 99908366 A

Priority

  • US 9903880 W
  • US 7617598 P
  • US 25315799 A

Abstract (en)

[origin: WO9943448A1] The present invention is related to wet processing methods for electronic components using process liquids having controlled levels (i.e., amounts) of gases. The present invention provides methods of wet processing where at least two process liquids used during a wet processing procedure contain different levels of gases. Sonic energy may optionally be used in one or more wet process steps of a wet processing procedure to enhance results. The methods of the present invention can result in, for example, improved cleaning or reduced particle contamination during a wet processing procedure.

IPC 1-7 (main, further and additional classification)

B08B 3/12; B08B 3/10

IPC 8 full level (invention and additional information)

B08B 3/08 (2006.01); B08B 3/04 (2006.01); B08B 3/12 (2006.01); H01L 21/304 (2006.01); H01L 21/306 (2006.01); H01L 21/308 (2006.01)

CPC (invention and additional information)

H01L 21/02052 (2013.01); B08B 3/04 (2013.01); B08B 3/12 (2013.01)

Citation (search report)

See references of WO 9943448A1

Designated contracting state (EPC)

DE FR GB IT

EPO simple patent family

WO 9943448 A1 19990902; WO 9943448 A8 20010208; AU 2781799 A 19990915; CN 1291921 A 20010418; EP 1087848 A1 20010404; JP 2002535829 A 20021022

INPADOC legal status


2001-09-19 [18W] WITHDRAWN

- Ref Legal Event Code: 18W

- Date of withdrawal: 20010706

2001-04-04 [17P] REQUEST FOR EXAMINATION FILED

- Ref Legal Event Code: 17P

- Effective date: 20000828

2001-04-04 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): DE FR GB IT