EP 1088316 A1 20010404 - THIN ELECTRET LAYER AND CORRESPONDING PRODUCTION METHOD
Title (en)
THIN ELECTRET LAYER AND CORRESPONDING PRODUCTION METHOD
Title (de)
DÜNNE ELEKTRETSCHICHT UND VERFAHREN ZU IHRER HERSTELLUNG
Title (fr)
MINCE COUCHE D'ELECTRET ET SON PROCEDE DE PRODUCTION
Publication
Application
Priority
- AT 9900119 W 19990512
- AT 80098 A 19980512
Abstract (en)
[origin: WO9959172A1] Thin electret layer with a layer thickness of less than 200 mu m made of polymers containing fluorine. The mean chain length of the polymer chain contained in the layer produced by evaporation, sputtering, ablation, blowing or dispersion using a solid starting material made of polymers containing fluorine is at least half the length of the chains in the starting material and the cross-linking degree of the polymer chains contained in the layer is at the most twice that of the cross-linking degree in the starting material. In order to produce said electret layer, a layer made of polymers containing fluorine is applied on a substrate by means of pulsed laser deposition. The wave length of the laser beams used is between 100 nm and 20 mu m and pulse duration is between 10 fs and 1 ms.
IPC 1-7
IPC 8 full level
C23C 14/12 (2006.01); C23C 14/28 (2006.01); H01G 7/02 (2006.01); H01L 21/822 (2006.01); H01L 27/04 (2006.01); H04R 19/01 (2006.01); H04R 31/00 (2006.01)
CPC (source: EP)
H01G 7/023 (2013.01)
Citation (search report)
See references of WO 9959172A1
Designated contracting state (EPC)
AT DE DK FI FR GB
DOCDB simple family (publication)
WO 9959172 A1 19991118; AT A80098 A 19990615; AU 3802599 A 19991129; EP 1088316 A1 20010404; JP 2002515643 A 20020528
DOCDB simple family (application)
AT 9900119 W 19990512; AT 80098 A 19980512; AU 3802599 A 19990512; EP 99920448 A 19990512; JP 2000548896 A 19990512