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Current content: 155 263 406 patent documents

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215 613 new documents added

1 342 057 documents amended

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EP 1088341 A2 20010404 - METHOD OF PRODUCING A STRUCTURED SURFACE

Title (en)

METHOD OF PRODUCING A STRUCTURED SURFACE

Title (de)

VERFAHREN ZUR ERZEUGUNG EINER STRUKTURIERTEN OBERFLÄCHE

Title (fr)

PROCEDE DE PRODUCTION D'UNE SURFACE STRUCTUREE

Publication

EP 1088341 A2 20010404 (EN)

Application

EP 99922377 A 19990520

Priority

GB 9901606 W 19990520
GB 9810950 A 19980522
GB 9813267 A 19980620
GB 9905230 A 19990309

Abstract (en)

[origin: WO9962106A2] Clusters of an etchable material such as silver are deposited on a silicon substrate (10) to form peaks (12). The peaks (12) are then at least partially etched away by plasma etching to form cones (14) or pillars of silicon on the substrate (10).

IPC 1-7

H01L 21/308; H01J 9/02

IPC 8 full level

H01J 9/02 (2006.01); H01L 21/302 (2006.01)

CPC (source: EP)

B82Y 15/00 (2013.01); H01J 9/025 (2013.01)

Citation (search report)

See references of WO 9962106A2

Designated contracting state (EPC)

AT BE CH DE DK ES FI FR GB IE IT LI NL PT SE

DOCDB simple family (publication)

WO 9962106 A2 19991202; WO 9962106 A3 20000302; EP 1088341 A2 20010404; JP 2002517087 A 20020611

DOCDB simple family (application)

GB 9901606 W 19990520; EP 99922377 A 19990520; JP 2000551425 A 19990520