Global Patent Index - EP 1088341 A2

EP 1088341 A2 2001-04-04 - METHOD OF PRODUCING A STRUCTURED SURFACE

Title (en)

METHOD OF PRODUCING A STRUCTURED SURFACE

Title (de)

VERFAHREN ZUR ERZEUGUNG EINER STRUKTURIERTEN OBERFLÄCHE

Title (fr)

PROCEDE DE PRODUCTION D'UNE SURFACE STRUCTUREE

Publication

EP 1088341 A2 (EN)

Application

EP 99922377 A

Priority

  • GB 9901606 W
  • GB 9810950 A
  • GB 9813267 A
  • GB 9905230 A

Abstract (en)

[origin: WO9962106A2] Clusters of an etchable material such as silver are deposited on a silicon substrate (10) to form peaks (12). The peaks (12) are then at least partially etched away by plasma etching to form cones (14) or pillars of silicon on the substrate (10).

IPC 1-7 (main, further and additional classification)

H01L 21/308; H01J 9/02

IPC 8 full level (invention and additional information)

H01J 9/02 (2006.01); H01L 21/302 (2006.01)

CPC (invention and additional information)

B82Y 15/00 (2013.01); H01J 9/025 (2013.01)

Citation (search report)

See references of WO 9962106A3

Designated contracting state (EPC)

AT BE CH DE DK ES FI FR GB IE IT LI NL PT SE

EPO simple patent family

WO 9962106 A2 19991202; WO 9962106 A3 20000302; EP 1088341 A2 20010404; JP 2002517087 A 20020611

INPADOC legal status


2003-10-22 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20030416

2003-01-22 [17Q] FIRST EXAMINATION REPORT

- Effective date: 20021205

2001-04-04 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20001116

2001-04-04 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A2

- Designated State(s): AT BE CH DE DK ES FI FR GB IE IT LI NL PT SE