EP 1088342 A1 20010404 - METHOD FOR DETERMINING PARAMETER DISTRIBUTIONS OF OBJECT PROPERTIES
Title (en)
METHOD FOR DETERMINING PARAMETER DISTRIBUTIONS OF OBJECT PROPERTIES
Title (de)
VERFAHREN ZUM BESTIMMEN VON PARAMETERVERTEILUNGEN VON OBJEKTEIGENSCHAFTEN
Title (fr)
PROCEDE POUR DETERMINER DES REPARTITIONS DE PARAMETRES DE PROPRIETES D'OBJETS
Publication
Application
Priority
- DE 19826510 A 19980615
- DE 19913922 A 19990326
- EP 9903706 W 19990528
Abstract (en)
[origin: WO9966548A1] The invention relates to a method for determining parameter distributions of object properties obtained when objects are treated by at least two treatment processes. According to said method it is possible separately to determine the influences of individual treatment processes on a parameter distribution when the parameter distributions of at least two objects are determined after they have undergone the treatment processes. During at least one treatment process at least one object is positioned differently in relation to at least one other object.
IPC 1-7
IPC 8 full level
G01N 35/00 (2006.01); H01L 21/66 (2006.01)
CPC (source: EP)
G01N 21/211 (2013.01); G01N 21/8422 (2013.01); G01N 21/9501 (2013.01); H01L 22/10 (2013.01)
Citation (search report)
See references of WO 9966548A1
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
WO 9966548 A1 19991223; EP 1088342 A1 20010404; JP 2002518846 A 20020625; TW 448297 B 20010801
DOCDB simple family (application)
EP 9903706 W 19990528; EP 99927787 A 19990528; JP 2000555289 A 19990528; TW 88109790 A 19990611