Global Patent Index - EP 1088342 A1

EP 1088342 A1 2001-04-04 - METHOD FOR DETERMINING PARAMETER DISTRIBUTIONS OF OBJECT PROPERTIES

Title (en)

METHOD FOR DETERMINING PARAMETER DISTRIBUTIONS OF OBJECT PROPERTIES

Title (de)

VERFAHREN ZUM BESTIMMEN VON PARAMETERVERTEILUNGEN VON OBJEKTEIGENSCHAFTEN

Title (fr)

PROCEDE POUR DETERMINER DES REPARTITIONS DE PARAMETRES DE PROPRIETES D'OBJETS

Publication

EP 1088342 A1 (DE)

Application

EP 99927787 A

Priority

  • DE 19826510 A
  • DE 19913922 A
  • EP 9903706 W

Abstract (en)

[origin: WO9966548A1] The invention relates to a method for determining parameter distributions of object properties obtained when objects are treated by at least two treatment processes. According to said method it is possible separately to determine the influences of individual treatment processes on a parameter distribution when the parameter distributions of at least two objects are determined after they have undergone the treatment processes. During at least one treatment process at least one object is positioned differently in relation to at least one other object.

IPC 1-7 (main, further and additional classification)

H01L 21/66

IPC 8 full level (invention and additional information)

H01L 21/66 (2006.01); G01N 35/00 (2006.01)

CPC (invention and additional information)

G01N 35/00 (2013.01)

Citation (search report)

See references of WO 9966548A1

Designated contracting state (EPC)

DE FR GB IT

EPO simple patent family

WO 9966548 A1 19991223; EP 1088342 A1 20010404; JP 2002518846 A 20020625; TW 448297 B 20010801

INPADOC legal status


2007-08-22 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20070301

2006-09-20 [17Q] FIRST EXAMINATION REPORT

- Effective date: 20060818

2001-04-04 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20001212

2001-04-04 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): DE FR GB IT