EP 1088622 A2 20010404 - Platen with web release apparatus
Title (en)
Platen with web release apparatus
Title (de)
Platte mit Polierkissen Hebevorrichtung
Title (fr)
Plateau avec dispositif de sustentation du tampon de polissage
Publication
Application
Priority
US 15730399 P 19991001
Abstract (en)
Generally, a method and apparatus for releasing polishing material in a polishing system. In one embodiment, the apparatus includes a platen having one or more nozzles coupled thereto. The platen has a support surface adapted to support the polishing material. The nozzles are adapted to flow a fluid therethrough that places the polishing material in a spaced-apart relation to the platen. In another embodiment, the one or more nozzles further include a centerline that forms an acute angle with the support surface. In one embodiment, the method includes the steps of supporting at least a portion of the polishing material on the platen, supplying a fluid between the polishing material, and lifting the polishing material to a spaced-apart relation to the platen. <IMAGE>
IPC 1-7
IPC 8 full level
B24B 21/00 (2006.01); B24B 21/04 (2006.01); B24B 21/18 (2006.01); B24B 37/30 (2012.01); B24B 41/04 (2006.01); B24B 57/02 (2006.01); H01L 21/304 (2006.01)
CPC (source: EP)
B24B 21/04 (2013.01); B24B 37/30 (2013.01); B24B 41/04 (2013.01); B24B 57/02 (2013.01)
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
EP 1088622 A2 20010404; EP 1088622 A3 20030903; JP 2001156031 A 20010608; TW 472315 B 20020111
DOCDB simple family (application)
EP 00121213 A 20000929; JP 2000302329 A 20001002; TW 89120315 A 20001218