EP 1089801 A1 20010411 - METHOD AND APPARATUS FOR RECOVERY OF WATER AND SLURRY ABRASIVES USED FOR CHEMICAL AND MECHANICAL PLANARIZATION
Title (en)
METHOD AND APPARATUS FOR RECOVERY OF WATER AND SLURRY ABRASIVES USED FOR CHEMICAL AND MECHANICAL PLANARIZATION
Title (de)
VERFAHREN UND VORRICHTUNG FÜR DIE RÜCKGEWINNUNG VON WASSER UND POLIERSCHLAMM BEIM CHEMISCHEN UND MECHANISCHEN POLIEREN
Title (fr)
PROCEDE ET APPAREIL POUR LA RECUPERATION D'EAU ET D'ABRASIFS EN SUSPENSION UTILISES POUR LA PLANARISATION CHIMIQUE ET MECANIQUE
Publication
Application
Priority
- US 9911498 W 19990525
- US 9928098 A 19980618
Abstract (en)
[origin: WO9965592A1] A method of recovering liquid and abrasives from an aqueous slurry containing finely divided, suspended solids comprising at least one filtering step utilizing a sintered metal membrane and/or ceramic membrane in conjunction with a method of measuring specific gravity or density, physically concentrating and separating the abrasive particles from the effluent allowing disposal through the normal industrial waste system or reuse of the supernatant liquid. The method is further used for recovery of solids for reuse in other, less critical applications thus reducing or eliminating the waste by-products of the polishing process.
IPC 1-7
IPC 8 full level
B01D 37/04 (2006.01); B01D 61/14 (2006.01); B01D 61/22 (2006.01); B01D 69/12 (2006.01); B24B 37/04 (2012.01); B24B 57/00 (2006.01); C02F 1/44 (2006.01); H01L 21/304 (2006.01)
CPC (source: EP KR)
B01D 37/04 (2013.01 - KR); B01D 61/145 (2013.01 - EP); B01D 61/22 (2013.01 - EP); B24B 37/04 (2013.01 - EP); B24B 57/02 (2013.01 - EP); C02F 1/444 (2013.01 - EP); C02F 2103/346 (2013.01 - EP)
Citation (search report)
See references of WO 9965592A1
Designated contracting state (EPC)
AT DE ES FI FR GB IE IT NL SE
DOCDB simple family (publication)
WO 9965592 A1 19991223; AU 4202799 A 20000105; CA 2335175 A1 19991223; CN 1305393 A 20010725; EP 1089801 A1 20010411; JP 2002518150 A 20020625; KR 20010071479 A 20010728; TW 403688 B 20000901
DOCDB simple family (application)
US 9911498 W 19990525; AU 4202799 A 19990525; CA 2335175 A 19990525; CN 99807438 A 19990525; EP 99925812 A 19990525; JP 2000554463 A 19990525; KR 20007014226 A 20001215; TW 88109612 A 19990609