Global Patent Index - EP 1090410 A1

EP 1090410 A1 2001-04-11 - ELECTRON DETECTOR

Title (en)

ELECTRON DETECTOR

Title (de)

ELEKTRONENDETEKTOR

Title (fr)

DETECTEUR D'ELECTRONS

Publication

EP 1090410 A1 (EN)

Application

EP 99929302 A

Priority

  • EP 9904326 W
  • US 9153398 P

Abstract (en)

[origin: WO0002230A1] An electron detector is proposed particularly for detecting secondary electrons in a micro electron column based e-beam tool such as e.g. a scanning electron microscope. The electron detector has a flat detector body (10) and a plurality of trench-shaped channels (12) extending parallel to the body surface and being e.g. open on this surface. The channels (12) extend radially from an opening (11) for the primary electron beam (1) of the tool. Furthermore, the detector comprises an inner and an outer ring electrode (15, 16) for generating an electric field which is rotationally symmetrical in relation to the axis of the opening (11) and by which the secondary electrons are accelerated along the length of the channels (12). The rotational symmetry of the electric field prevents unwanted interaction with the primary electron beam. The preferred embodiment of the electron detector is manufactured by micro-machining, starting from a silicon on insulator wafer.

IPC 1-7 (main, further and additional classification)

H01J 43/04

IPC 8 full level (invention and additional information)

H01J 37/244 (2006.01)

CPC (invention and additional information)

H01J 37/244 (2013.01); H01J 2237/2444 (2013.01); H01J 2237/28 (2013.01)

Citation (search report)

See references of WO 0002230A1

Designated contracting state (EPC)

CH DE FR GB LI NL

EPO simple patent family

WO 0002230 A1 20000113; EP 1090410 A1 20010411

INPADOC legal status


2005-07-06 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20050101

2004-12-29 [RIN1] INVENTOR (CORRECTION)

- Inventor name: PFEFFER, TRACEY

2004-12-29 [RIN1] INVENTOR (CORRECTION)

- Inventor name: STEBLER, CAMILLE

2004-12-29 [RIN1] INVENTOR (CORRECTION)

- Inventor name: STAUFER, URS

2001-04-11 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20010108

2001-04-11 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): CH DE FR GB LI NL