EP 1090410 A1 20010411 - ELECTRON DETECTOR
Title (en)
ELECTRON DETECTOR
Title (de)
ELEKTRONENDETEKTOR
Title (fr)
DETECTEUR D'ELECTRONS
Publication
Application
Priority
- EP 9904326 W 19990622
- US 9153398 P 19980702
Abstract (en)
[origin: WO0002230A1] An electron detector is proposed particularly for detecting secondary electrons in a micro electron column based e-beam tool such as e.g. a scanning electron microscope. The electron detector has a flat detector body (10) and a plurality of trench-shaped channels (12) extending parallel to the body surface and being e.g. open on this surface. The channels (12) extend radially from an opening (11) for the primary electron beam (1) of the tool. Furthermore, the detector comprises an inner and an outer ring electrode (15, 16) for generating an electric field which is rotationally symmetrical in relation to the axis of the opening (11) and by which the secondary electrons are accelerated along the length of the channels (12). The rotational symmetry of the electric field prevents unwanted interaction with the primary electron beam. The preferred embodiment of the electron detector is manufactured by micro-machining, starting from a silicon on insulator wafer.
IPC 1-7
IPC 8 full level
H01J 37/244 (2006.01)
CPC (source: EP)
H01J 37/244 (2013.01); H01J 2237/2444 (2013.01); H01J 2237/28 (2013.01)
Citation (search report)
See references of WO 0002230A1
Designated contracting state (EPC)
CH DE FR GB LI NL
DOCDB simple family (publication)
DOCDB simple family (application)
EP 9904326 W 19990622; EP 99929302 A 19990622