Global Patent Index - EP 1090420 A1

EP 1090420 A1 2001-04-11 - ENDPOINT DETECTION IN THE FABRICATION OF ELECTRONIC DEVICES

Title (en)

ENDPOINT DETECTION IN THE FABRICATION OF ELECTRONIC DEVICES

Title (de)

ENDPUNKTBESTIMMUNG BEI DER HERSTELLUNG ELEKTRONISCHER VORRICHTUNGEN

Title (fr)

DETECTION DES EXTREMITES DANS LA FABRICATION DE DISPOSITIFS ELECTRONIQUES

Publication

EP 1090420 A1 (EN)

Application

EP 00916462 A

Priority

  • US 0007070 W
  • US 28649399 A

Abstract (en)

[origin: WO0060657A1] A chamber (28) comprises a radiation source (58) capable of emitting radiation having a wavelength that is substantially absorbed in a predetermined pathlength in a thickness of a layer (22) on a substrate, and a radiation detector (62) adapted to detect the radiation. The radiation is substantially absorbed in a first thickness of the layer (22), and after at least partial processing of the layer (22), is at least partially transmitted through a second thickness of the layer (22) and reflected by one or more underlayers (24) of the substrate (20).

IPC 1-7 (main, further and additional classification)

H01L 21/66; C23C 16/44; C23C 16/52; G01B 11/06; H01J 37/32

IPC 8 full level (invention and additional information)

C23C 14/54 (2006.01); C23C 16/44 (2006.01); C23C 16/52 (2006.01); G01B 11/06 (2006.01); H01L 21/205 (2006.01); H01L 21/302 (2006.01); H01L 21/3065 (2006.01)

CPC (invention and additional information)

H01J 37/32963 (2013.01); C23C 16/4405 (2013.01); C23C 16/52 (2013.01); G01B 11/0683 (2013.01)

Citation (search report)

See references of WO 0060657A1

Designated contracting state (EPC)

DE FR GB IT

EPO simple patent family

WO 0060657 A1 20001012; EP 1090420 A1 20010411; JP 2002541663 A 20021203; TW 455973 B 20010921

INPADOC legal status


2005-03-23 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20040921

2004-06-23 [17Q] FIRST EXAMINATION REPORT

- Effective date: 20040510

2004-05-12 [RBV] DESIGNATED CONTRACTING STATES (CORRECTION):

- Designated State(s): DE FR GB IT

2001-04-11 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20001121

2001-04-11 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE