Global Patent Index - EP 1090422 A1

EP 1090422 A1 2001-04-11 - METHOD FOR PRODUCING THIN SUBSTRATE LAYERS

Title (en)

METHOD FOR PRODUCING THIN SUBSTRATE LAYERS

Title (de)

VERFAHREN ZUR FERTIGUNG VON DÜNNEN SUBSTRATSCHICHTEN

Title (fr)

PROCEDE POUR LA PRODUCTION DE COUCHES DE SUBSTRAT MINCES

Publication

EP 1090422 A1 (DE)

Application

EP 99939373 A

Priority

  • DE 9901826 W
  • DE 19827717 A

Abstract (en)

[origin: DE19840421A1] A thin substrate layer is produced from two bonded substrates (1, 2) having interface channel recesses (5) for etchant penetration. A thin substrate layer is produced by: (a) bonding two substrate front faces using one or more intermediate bonding layers (3, 4), at least one of the bonding layers or the front face of one of the substrates (1, 2) having channel-like recesses (5) which allow sideways penetration of an etchant; (b) thinning one substrate (1) down to a substrate layer (1a); and (c) detaching the substrate layer from the other substrate (2) by introducing etchant into the recesses. An Independent claim is also included for a substrate structure resulting from step (a) of the above process.

IPC 1-7 (main, further and additional classification)

H01L 21/78; H01L 21/20

IPC 8 full level (invention and additional information)

H01L 21/306 (2006.01); H01L 21/20 (2006.01); H01L 21/301 (2006.01); H01L 21/3063 (2006.01)

CPC (invention and additional information)

H01L 21/2007 (2013.01); H01L 21/3063 (2013.01); H01L 2221/68363 (2013.01); Y10S 438/967 (2013.01)

Citation (search report)

See references of WO 9967820A1

Designated contracting state (EPC)

DE FR IT

EPO simple patent family

DE 19840421 A1 19991223; DE 19840421 C2 20000531; EP 1090422 A1 20010411; JP 2002519847 A 20020702; US 6417075 B1 20020709; WO 9967820 A1 19991229

INPADOC legal status


2006-05-17 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20051119

2003-11-19 [RAP1] TRANSFER OF RIGHTS OF AN EP PUBLISHED APPLICATION

- Owner name: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DERANGEWAND

2001-04-11 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20010111

2001-04-11 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): DE FR IT