Global patent index - EP 1092173 A1

EP 1092173 A1 2001-04-18 - SILVER BASED PHOTOMASKS

Title (en)

SILVER BASED PHOTOMASKS

Title (de)

AUF SILBER BASIERENDE PHOTOMASKEN

Title (fr)

PHOTOMASQUES A BASE D'ARGENT

Publication

EP 1092173 A1 (EN)

Application

EP 99923736 A

Priority

  • GB 9901484 W
  • GB 9811563 A

Abstract (en)

[origin: WO9963406A1] In the field of semiconductor photomask manufacture there is a need to produce photomasks more rapidly and with fewer flaws. There is also a need for photomasks capable of producing much finer resolution circuits than hitherto. There is disclosed a method of manufacturing a photomask (10) in which a substrate (11) is coated with an emulsion of gelatin (18) and a photosensitive silver halide (17). On exposure to an electron beam (15) or a laser beam, controlled to generate a desired pattern of movement, the silver halide reduces to create a photomask (10) after development and fixing.

IPC 1-7 (main, further and additional classification)

G03F 1/12

IPC 8 full level (invention and additional information)

G03F 1/54 (2012.01); H01L 21/027 (2006.01)

CPC (invention and additional information)

G03F 1/54 (2013.01)

Citation (search report)

See references of WO 9963406A1

Designated contracting state (EPC)

DE FR GB IT NL SE

EPO simple patent family

WO 9963406 A1 19991209; AU 4050199 A 19991220; EP 1092173 A1 20010418; GB 9811563 D0 19980729; JP 2002517785 A 20020618

INPADOC legal status

2004-06-16 [18D] DEEMED TO BE WITHDRAWN

- Ref Legal Event Code: 18D

- Effective date: 20031202

2001-04-18 [17P] REQUEST FOR EXAMINATION FILED

- Ref Legal Event Code: 17P

- Effective date: 20001214

2001-04-18 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): DE FR GB IT NL SE