Global Patent Index - EP 1093142 A2

EP 1093142 A2 2001-04-18 - Dual motion electrostatic actuator design for mems micro-relay

Title (en)

Dual motion electrostatic actuator design for mems micro-relay

Title (de)

Elektrostatischer Betätiger mit doppeltem Antrieb für mems mikro-relais

Title (fr)

Actuateur électrostatique à mouvement double pour mems micro-relais

Publication

EP 1093142 A2 (EN)

Application

EP 00203564 A

Priority

US 41942299 A

Abstract (en)

A dual micro-electromechanical actuator for providing dual actuation to a micromachine. The actuator includes a first substrate upon which a first actuating electrode is formed. A second substrate located proximate to but spaced from the first substrate supports a second actuating electrode. A micromachine device, such as a thin membrane, plate or cantilever, is disposed between the actuating electrodes. When one of the actuating electrodes is selectively activated by applying a voltage thereto, an electrostatic attraction force is produced which causes movement of the micromachine in the direction of the activated actuating electrode. <IMAGE>

IPC 1-7 (main, further and additional classification)

H01H 59/00

IPC 8 full level (invention and additional information)

B81B 3/00 (2006.01); B81C 3/00 (2006.01); H01H 59/00 (2006.01)

CPC (invention and additional information)

H01H 59/0009 (2013.01)

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

EPO simple patent family

EP 1093142 A2 20010418; CA 2323189 A1 20010415; JP 2001179699 A 20010703

INPADOC legal status


2002-07-17 [18W] WITHDRAWN

- Date of withdrawal: 20020516

2001-04-18 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A2

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

2001-04-18 [AX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT TO

- Free text: AL;LT;LV;MK;RO;SI