EP 1093142 A2 20010418 - Dual motion electrostatic actuator design for mems micro-relay
Title (en)
Dual motion electrostatic actuator design for mems micro-relay
Title (de)
Elektrostatischer Betätiger mit doppeltem Antrieb für mems mikro-relais
Title (fr)
Actuateur électrostatique à mouvement double pour mems micro-relais
Publication
Application
Priority
US 41942299 A 19991015
Abstract (en)
A dual micro-electromechanical actuator for providing dual actuation to a micromachine. The actuator includes a first substrate upon which a first actuating electrode is formed. A second substrate located proximate to but spaced from the first substrate supports a second actuating electrode. A micromachine device, such as a thin membrane, plate or cantilever, is disposed between the actuating electrodes. When one of the actuating electrodes is selectively activated by applying a voltage thereto, an electrostatic attraction force is produced which causes movement of the micromachine in the direction of the activated actuating electrode. <IMAGE>
IPC 1-7
IPC 8 full level
B81B 3/00 (2006.01); B81C 3/00 (2006.01); H01H 59/00 (2006.01)
CPC (source: EP)
H01H 59/0009 (2013.01)
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
EP 1093142 A2 20010418; CA 2323189 A1 20010415; JP 2001179699 A 20010703
DOCDB simple family (application)
EP 00203564 A 20001016; CA 2323189 A 20001013; JP 2000315660 A 20001016