Global patent index - EP 1093662 A1

EP 1093662 A1 2001-04-25 - APPARATUS AND METHOD FOR REDUCING CHARGE ACCUMULATION ON A SUBSTRATE

Title (en)

APPARATUS AND METHOD FOR REDUCING CHARGE ACCUMULATION ON A SUBSTRATE

Title (de)

GERÄT UND VERFAHREN ZUR REDUZIERUNG DER LADUNGSANSAMMLUNG AUF EINEM SUBSTRAT

Title (fr)

DISPOSITIF ET PROCEDE PERMETTANT DE REDUIRE L'ACCUMULATION DE CHARGE SUR UN SUBSTRAT

Publication

EP 1093662 A1 (EN)

Application

EP 00930850 A

Priority

  • US 0040017 W
  • US 30411899 A

Abstract (en)

[origin: WO0067289A1] A system for reducing surface charge on a target surface in charged particle beam lithography or microscopy, using an apparatus including: a beam column that outputs a charged particle beam towards the surface; and a charge reducing device positioned between the surface and the beam column, where the charge reducing device emits charged particles to neutralize charge on the surface. The charge reducing device can include a MOS device and a voltage source, where the voltage source is coupled to provide a voltage across the MOS device to cause the MOS device to emit the charged particles. The charge reducing device can include multiple MOS devices mounted on a mechanical mount and a voltage source, where the voltage source is coupled to provide a voltage across the MOS devices to cause the MOS devices to emit the charged particles. The associated method for reducing surface charge on a surface includes outputting the charged particle beam towards the target surface and emitting charged particles to neutralize the resulting charge on the surface.

IPC 1-7 (main, further and additional classification)

H01J 37/02; H01J 1/30

IPC 8 full level (invention and additional information)

G21K 5/04 (2006.01); H01J 37/02 (2006.01); H01J 37/073 (2006.01); H01J 37/12 (2006.01); H01J 37/20 (2006.01); H01L 21/027 (2006.01)

CPC (invention and additional information)

H01J 37/026 (2013.01); H01J 2237/0044 (2013.01)

Citation (search report)

See references of WO 0067289A1

Designated contracting state (EPC)

DE GB NL

EPO simple patent family

WO 0067289 A1 20001109; WO 0067289 A9 20020808; AU 4860300 A 20001117; CA 2336369 A1 20001109; EP 1093662 A1 20010425; IL 140122 D0 20020210; JP 2002543575 A 20021217

INPADOC legal status

2004-08-04 [18D] DEEMED TO BE WITHDRAWN

- Ref Legal Event Code: 18D

- Effective date: 20040129

2004-05-12 [RBV] DESIGNATED CONTRACTING STATES (CORRECTION):

- Ref Legal Event Code: RBV

- Designated State(s): DE GB NL

2003-11-05 [17Q] FIRST EXAMINATION REPORT

- Ref Legal Event Code: 17Q

- Effective date: 20030918

2001-04-25 [17P] REQUEST FOR EXAMINATION FILED

- Ref Legal Event Code: 17P

- Effective date: 20010123

2001-04-25 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

2001-04-25 [AX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT TO

- Ref Legal Event Code: AX

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