EP 1093662 A1 20010425 - APPARATUS AND METHOD FOR REDUCING CHARGE ACCUMULATION ON A SUBSTRATE
Title (en)
APPARATUS AND METHOD FOR REDUCING CHARGE ACCUMULATION ON A SUBSTRATE
Title (de)
GERÄT UND VERFAHREN ZUR REDUZIERUNG DER LADUNGSANSAMMLUNG AUF EINEM SUBSTRAT
Title (fr)
DISPOSITIF ET PROCEDE PERMETTANT DE REDUIRE L'ACCUMULATION DE CHARGE SUR UN SUBSTRAT
Publication
Application
Priority
- US 0040017 W 20000503
- US 30411899 A 19990503
Abstract (en)
[origin: WO0067289A1] A system for reducing surface charge on a target surface in charged particle beam lithography or microscopy, using an apparatus including: a beam column that outputs a charged particle beam towards the surface; and a charge reducing device positioned between the surface and the beam column, where the charge reducing device emits charged particles to neutralize charge on the surface. The charge reducing device can include a MOS device and a voltage source, where the voltage source is coupled to provide a voltage across the MOS device to cause the MOS device to emit the charged particles. The charge reducing device can include multiple MOS devices mounted on a mechanical mount and a voltage source, where the voltage source is coupled to provide a voltage across the MOS devices to cause the MOS devices to emit the charged particles. The associated method for reducing surface charge on a surface includes outputting the charged particle beam towards the target surface and emitting charged particles to neutralize the resulting charge on the surface.
IPC 1-7
IPC 8 full level
G21K 5/04 (2006.01); H01J 37/02 (2006.01); H01J 37/073 (2006.01); H01J 37/12 (2006.01); H01J 37/20 (2006.01); H01L 21/027 (2006.01)
CPC (source: EP KR)
H01J 37/026 (2013.01 - EP); H01J 37/317 (2013.01 - KR); H01J 2237/0044 (2013.01 - EP)
Citation (search report)
See references of WO 0067289A1
Designated contracting state (EPC)
DE GB NL
DOCDB simple family (publication)
WO 0067289 A1 20001109; WO 0067289 A9 20020808; AU 4860300 A 20001117; CA 2336369 A1 20001109; EP 1093662 A1 20010425; IL 140122 A0 20020210; JP 2002543575 A 20021217; KR 20010071719 A 20010731
DOCDB simple family (application)
US 0040017 W 20000503; AU 4860300 A 20000503; CA 2336369 A 20000503; EP 00930850 A 20000503; IL 14012200 A 20000503; JP 2000616041 A 20000503; KR 20017000058 A 20010103