Global Patent Index - EP 1095240 A1

EP 1095240 A1 2001-05-02 - SHADOW CASTING METHOD FOR PROFILE MEASUREMENT

Title (en)

SHADOW CASTING METHOD FOR PROFILE MEASUREMENT

Title (de)

SCHATTENBILDVERFAHREN ZUR PROFILMESSUNG

Title (fr)

TECHNIQUE DE PROJECTION D'OMBRE POUR MESURE DE PROFILS

Publication

EP 1095240 A1 (EN)

Application

EP 99929665 A

Priority

  • IL 9900364 W
  • IL 12522898 A

Abstract (en)

[origin: WO0002007A1] Apparatus (10) and method for determining critical dimensions of an object, using a light source (20) for propagating a non-coherent beam of light, which is collimated and propagated through a telecentric lens (30) towards a two-dimensional imaging device (32) for imaging the collimated beam of light. A viewing stand (40) situated between the collimator (22) and the telecentric lens (30), holds the object within the collimated beam of light, so that a silhouette of the object is obtained on the imaging device. A data processing means (16) coupled to the two-dimensional imaging device (32) for determining the critical dimensions of the object on the basis of its silhouette. An alignment unit (42, 44, 46, 50) is provided for aligning the object on the viewing stand, so that the silhouette of the object is nominally normal to the axis of the beam of light within a predetermined allowable tilt angle.

IPC 1-7 (main, further and additional classification)

G01B 11/24; G01B 5/00

IPC 8 full level (invention and additional information)

G01B 11/24 (2006.01)

CPC (invention and additional information)

G01B 11/2433 (2013.01)

Citation (search report)

See references of WO 0002007A1

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

EPO simple patent family

WO 0002007 A1 20000113; AU 4644199 A 20000124; EP 1095240 A1 20010502; IL 125228 D0 19990312

INPADOC legal status


2006-08-02 [18D] APPLICATION DEEMED TO BE WITHDRAWN

- Effective date: 20060201

2001-05-02 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20001123

2001-05-02 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE