EP 1096152 A3 20011017 - Turbo molecular pump
Title (en)
Turbo molecular pump
Title (de)
Turbomolekularpumpe
Title (fr)
Pompe turbo-moléculaire
Publication
Application
Priority
DE 19951954 A 19991028
Abstract (en)
[origin: EP1096152A2] The turbo molecular pump has rotor discs (10) and stator discs (14) stacked in alternation within a cylindrical pump housing, cooperating for providing a pump effect. Each stator disc has a distance ring (16) which determines the distance between adjacent stator discs, with part (17) of the cylindrical housing forming an integral stator element (12). The rotor discs are attached to a rotor shaft (4) via clamp elements (24).
IPC 1-7
IPC 8 full level
F04D 19/04 (2006.01); F04D 29/08 (2006.01); F04D 29/52 (2006.01); F04D 29/64 (2006.01)
CPC (source: EP US)
F04D 19/042 (2013.01 - EP US); F04D 29/083 (2013.01 - EP US); F04D 29/644 (2013.01 - EP US)
Citation (search report)
[A] US 3168978 A 19650209 - LOUIS GARNIER HENRI, et al
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
EP 1096152 A2 20010502; EP 1096152 A3 20011017; EP 1096152 B1 20080423; AT E393314 T1 20080515; DE 19951954 A1 20010503; DE 50015120 D1 20080605; JP 2001153087 A 20010605; US 6461123 B1 20021008
DOCDB simple family (application)
EP 00122662 A 20001018; AT 00122662 T 20001018; DE 19951954 A 19991028; DE 50015120 T 20001018; JP 2000320537 A 20001020; US 69492300 A 20001024