EP 1097404 A1 20010509 - PROJECTION LENS FOR MICROLITHOGRAPHY
Title (en)
PROJECTION LENS FOR MICROLITHOGRAPHY
Title (de)
PROJEKTIONSOBJEKTIV FÜR DIE MIKROLITHOGRAPHIE
Title (fr)
OBJECTIF DE PROJECTION POUR LA MICROLITHOGRAPHIE
Publication
Application
Priority
- DE 19922209 A 19990514
- EP 9910233 W 19991221
Abstract (en)
[origin: US2002149855A1] The invention relates to a projection lens comprising a lens assembly that has at least one first narrowing of the group of light beams. A lens with a non-spherical surface is located in front of and/or behind the first narrowing.
IPC 1-7
IPC 8 full level
G02B 13/24 (2006.01); G02B 13/14 (2006.01); G02B 13/18 (2006.01); G03F 7/20 (2006.01); H01L 21/027 (2006.01)
CPC (source: EP KR US)
G02B 13/143 (2013.01 - EP US); G02B 13/18 (2013.01 - KR); G03F 7/70241 (2013.01 - EP US)
Designated contracting state (EPC)
DE FR GB IE NL
DOCDB simple family (publication)
US 2002149855 A1 20021017; US 6801364 B2 20041005; DE 19942281 A1 20001116; EP 1097404 A1 20010509; JP 2002544569 A 20021224; KR 100792652 B1 20080109; KR 20010053503 A 20010625; US 2005030635 A1 20050210; US 7154677 B2 20061226; WO 0070407 A1 20001123
DOCDB simple family (application)
US 76006601 A 20010112; DE 19942281 A 19990904; EP 9910233 W 19991221; EP 99967978 A 19991221; JP 2000618786 A 19991221; KR 20017000492 A 20010112; US 94456604 A 20040916