EP 1098189 A2 20010509 - Method for detecting an end point for an oxygen free plasma process
Title (en)
Method for detecting an end point for an oxygen free plasma process
Title (de)
Verfahren zur Endpunktbestimmung einer sauerstofffreien Plasmabehandlung
Title (fr)
Méthode de détection du point d'achèvement d'un traitement par plasma en l'absence d'oxygène
Publication
Application
Priority
US 43461799 A 19991105
Abstract (en)
A method for determining an endpoint for an oxygen free plasma stripping process for use in semiconductor wafer processing. The method comprises exciting a gas composition containing a nitrogen gas and a reactive gas to form the oxygen free plasma. The oxygen free plasma reacts with a substrate 88 having a photoresist and/or residues thereon to produce emitted light signals corresponding to an oxygen free reaction product. The endpoint is determined by optically measuring a primary emission signal of the oxygen free reaction product at a wavelength of about 387nm. The endpoint is determined when the plasma no longer reacts with the photoresist and/or residues on the substrate to produce the emitted light at about 387nm, an indication that the photoresist and /or residues have been removed from the wafer. Secondary emission signals of the oxygen free reaction product at about 358nm and 431nm can also be monitored for determining the endpoint. <IMAGE>
IPC 1-7
IPC 8 full level
H01L 21/302 (2006.01); G01N 21/68 (2006.01); G03F 7/42 (2006.01); H01J 37/32 (2006.01); H01L 21/02 (2006.01); H01L 21/027 (2006.01); H01L 21/3065 (2006.01); H01L 21/311 (2006.01); H01L 21/3213 (2006.01); H01L 21/66 (2006.01)
CPC (source: EP KR US)
G01N 21/68 (2013.01 - EP US); G03F 7/427 (2013.01 - EP US); H01J 37/32935 (2013.01 - EP US); H01J 37/32963 (2013.01 - EP US); H01L 21/02071 (2013.01 - EP US); H01L 21/31138 (2013.01 - EP US); H01L 22/00 (2013.01 - KR); H01J 2237/3342 (2013.01 - EP US)
Designated contracting state (EPC)
DE FR GB IT NL
DOCDB simple family (publication)
EP 1098189 A2 20010509; EP 1098189 A3 20020417; EP 1098189 B1 20050817; DE 60021982 D1 20050922; DE 60021982 T2 20060706; JP 2001189305 A 20010710; JP 5051332 B2 20121017; KR 100704108 B1 20070405; KR 20010051436 A 20010625; TW I239390 B 20050911; US 6492186 B1 20021210
DOCDB simple family (application)
EP 00309763 A 20001103; DE 60021982 T 20001103; JP 2000337593 A 20001106; KR 20000065250 A 20001103; TW 89122989 A 20001101; US 43461799 A 19991105