EP 1101243 A1 20010523 - METHOD FOR CHANGING A PROCESSING MEDIUM CONTAINED IN A PROCESSING TANK AND SYSTEM FOR CARRYING OUT THE METHOD
Title (en)
METHOD FOR CHANGING A PROCESSING MEDIUM CONTAINED IN A PROCESSING TANK AND SYSTEM FOR CARRYING OUT THE METHOD
Title (de)
VERFAHREN ZUM WECHSELN EINES IN EINEM BEHANDLUNGSBECKEN ENTHALTENEN BEHANDLUNGSMEDIUMS UND ANLAGE ZUR AUSFÜHRUNG DES VERFAHRENS
Title (fr)
PROCEDE PERMETTANT DE REMPLACER UN PRODUIT DE TRAITEMENT CONTENU DANS UN BASSIN DE TRAITEMENT ET INSTALLATION UTILISEE A CET EFFET
Publication
Application
Priority
- DE 19808463 A 19980302
- DE 19815039 A 19980403
- EP 9901285 W 19990227
Abstract (en)
[origin: WO9945574A1] The invention relates to a method for changing a processing medium for the wet chemical processing of silicon wafers, said processing medium being contained in a processing tank (12). According to the invention, a quantity of the contaminated processing medium is extracted and replaced by an equivalent quantity of non-contaminated processing medium at predetermined intervals and/or after a predetermined number of silicon wafers have been processed. Said quantity ( DELTA V) corresponds to a fraction of the overall quantity (Vmax) of processing medium (14) contained in the processing tank (12). The invention also relates to a system for the wet chemical processing of silicon wafers (16), comprising a processing tank (12), a tank supply line (26) and a tank discharge line (46). The inventive system is characterised in that a dosing pump (30, 56) is provided in the tank supply line (26) and in the tank discharge line (46) and in that a control device (80) is allocated to said dosing pumps. Said control device (80) enables the processing medium to be extracted from or introduced into the processing tank.
IPC 1-7
IPC 8 full level
H01L 21/00 (2006.01)
CPC (source: EP)
H01L 21/67057 (2013.01); H01L 21/67086 (2013.01)
Citation (search report)
See references of WO 9945574A1
Designated contracting state (EPC)
AT BE DE FR GB IE IT
DOCDB simple family (publication)
DOCDB simple family (application)
EP 9901285 W 19990227; EP 99907575 A 19990227