EP 1101245 A2 20010523 - METHOD AND DEVICE FOR CLEANING SUBSTRATES
Title (en)
METHOD AND DEVICE FOR CLEANING SUBSTRATES
Title (de)
VERFAHREN UND VORRICHTUNG ZUM REINIGEN VON SUBSTRATEN
Title (fr)
PROCEDE ET DISPOSITIF POUR LE NETTOYAGE DE SUBSTRATS
Publication
Application
Priority
- DE 19830162 A 19980706
- EP 9904633 W 19990703
Abstract (en)
[origin: DE19830162A1] The invention relates to a method and a device for cleaning substrates (8), according to which the substrates (8) are individually wet-cleaned in at least one primary cleaning unit (10, 11), transferred in the wet state into a collecting tank (30) filled with a treatment fluid and collected in the collecting tank (30). When a certain number of substrates has been collected in the collecting tank (30) said substrates are transported jointly as a single batch in the wet state to a secondary cleaning unit (35). In the secondary cleaning unit (35) the batch of substrates (8) is subjected to final wet cleaning and then dried.
IPC 1-7
IPC 8 full level
B08B 3/04 (2006.01); H01L 21/00 (2006.01); H01L 21/304 (2006.01)
CPC (source: EP KR)
H01L 21/304 (2013.01 - KR); H01L 21/67046 (2013.01 - EP); H01L 21/67057 (2013.01 - EP)
Citation (search report)
See references of WO 0002234A2
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
DE 19830162 A1 20000120; EP 1101245 A2 20010523; JP 2002520132 A 20020709; KR 20010071759 A 20010731; TW 439135 B 20010607; WO 0002234 A2 20000113; WO 0002234 A3 20000824
DOCDB simple family (application)
DE 19830162 A 19980706; EP 9904633 W 19990703; EP 99934565 A 19990703; JP 2000558541 A 19990703; KR 20017000196 A 20010106; TW 88111310 A 19990702