Global Patent Index - EP 1101245 A2

EP 1101245 A2 2001-05-23 - METHOD AND DEVICE FOR CLEANING SUBSTRATES

Title (en)

METHOD AND DEVICE FOR CLEANING SUBSTRATES

Title (de)

VERFAHREN UND VORRICHTUNG ZUM REINIGEN VON SUBSTRATEN

Title (fr)

PROCEDE ET DISPOSITIF POUR LE NETTOYAGE DE SUBSTRATS

Publication

EP 1101245 A2 (DE)

Application

EP 99934565 A

Priority

  • DE 19830162 A
  • EP 9904633 W

Abstract (en)

[origin: DE19830162A1] The invention relates to a method and a device for cleaning substrates (8), according to which the substrates (8) are individually wet-cleaned in at least one primary cleaning unit (10, 11), transferred in the wet state into a collecting tank (30) filled with a treatment fluid and collected in the collecting tank (30). When a certain number of substrates has been collected in the collecting tank (30) said substrates are transported jointly as a single batch in the wet state to a secondary cleaning unit (35). In the secondary cleaning unit (35) the batch of substrates (8) is subjected to final wet cleaning and then dried.

IPC 1-7 (main, further and additional classification)

H01L 21/00; B08B 3/04

IPC 8 full level (invention and additional information)

B08B 3/04 (2006.01); H01L 21/00 (2006.01); H01L 21/304 (2006.01)

CPC (invention and additional information)

H01L 21/67057 (2013.01); H01L 21/67046 (2013.01)

Citation (search report)

See references of WO 0002234A3

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

EPO simple patent family

DE 19830162 A1 20000120; EP 1101245 A2 20010523; JP 2002520132 A 20020709; TW 439135 B 20010607; WO 0002234 A2 20000113; WO 0002234 A3 20000824

INPADOC legal status


2002-07-03 [18W] APPLICATION WITHDRAWN

- Date of withdrawal: 20020506

2002-01-30 [RAP1] TRANSFER OF RIGHTS OF AN APPLICATION

- Owner name: STEAG MICROTECH GMBH

2001-05-23 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20010205

2001-05-23 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A2

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE