EP 1101944 A2 20010523 - Turbo molecular pump
Title (en)
Turbo molecular pump
Title (de)
Turbomolekularpumpe
Title (fr)
Pompe turbo-moléculaire
Publication
Application
Priority
DE 19956015 A 19991122
Abstract (en)
The pump has a rotor disk (10) and a stator disk (14) one behind the other in a cylindrical casing acting with each other to create a pumping effect. The casing consists of at least two parts divided along the cylinder axis (5), forming one-piece components with the corresponding separate parts of the stator disk.
Abstract (de)
Die Erfindung betrifft eine Turbomolekularpumpe mit Rotor (10) und Statorscheiben (14). Das zylindrische Gehäuse der Pumpe besteht aus mindestens zwei entlang der Zylinderachse (5) getrennten Teilen, welche mit den entsprechend getrennten Teilen der Statorscheiben (14) jeweils eine einstückige Baueinheit (12, 12') bilden. <IMAGE>
IPC 1-7
IPC 8 full level
F04D 19/04 (2006.01); F04D 29/54 (2006.01)
CPC (source: EP US)
F04D 19/042 (2013.01 - EP US); F04D 29/542 (2013.01 - EP US)
Citation (applicant)
- DE 2218615 A1 19731031 - LEYBOLD HERAEUS GMBH & CO KG
- EP 0751297 A1 19970102 - CIT ALCATEL [FR]
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
EP 1101944 A2 20010523; EP 1101944 A3 20011017; EP 1101944 B1 20060719; AT E333590 T1 20060815; DE 19956015 A1 20010523; DE 50013185 D1 20060831; JP 2001153088 A 20010605; US 6561755 B1 20030513
DOCDB simple family (application)
EP 00124676 A 20001111; AT 00124676 T 20001111; DE 19956015 A 19991122; DE 50013185 T 20001111; JP 2000340217 A 20001108; US 71814700 A 20001121