Global Patent Index - EP 1102872 A1

EP 1102872 A1 2001-05-30 - NOVEL ORGANOCUPROUS PRECURSORS FOR CHEMICAL VAPOR DEPOSITION OF A COPPER FILM

Title (en)

NOVEL ORGANOCUPROUS PRECURSORS FOR CHEMICAL VAPOR DEPOSITION OF A COPPER FILM

Title (de)

NEUE ORGANOKUPFER-VORLÄUFER FÜR CVD VON KUPFERFILMEN

Title (fr)

NOUVEAUX PRECURSEURS ORGANO-CUIVREUX DESTINES AU DEPOT CHIMIQUE EN PHASE VAPEUR D'UN FILM DE CUIVRE

Publication

EP 1102872 A1 (EN)

Application

EP 99959960 A

Priority

  • KR 9900743 W
  • KR 19990013236 A

Abstract (en)

[origin: WO0063461A1] An organocuprous compound of formula (I) of the present invention can be conveniently used in a low-temperature CVD process for the mass production of a contaminant-free copper film having good thermal stability, wherein: R1, R2 and R3 are each independently a C1-8 alkoxy, aryl or aryloxy group, R4 and R5 are each independently hydrogen, fluorine, a CnF2n+1 or CnH2n+1 group, n being an integer in the range of 1 to 6, R6 is hydrogen, fluorine or C1-4 alkyl group, and m is 1 or 2, when m is 1, C=C represents C2C, and when m is 2, C=C represents C=C.

IPC 1-7 (main, further and additional classification)

C23C 18/38

IPC 8 full level (invention and additional information)

C23C 18/08 (2006.01); C07F 1/08 (2006.01); C23C 16/18 (2006.01); C23C 18/38 (2006.01); C23C 24/08 (2006.01); H01L 21/28 (2006.01); H01L 21/285 (2006.01)

CPC (invention and additional information)

C23C 16/18 (2013.01); C07F 1/08 (2013.01)

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

EPO simple patent family

WO 0063461 A1 20001026; CN 1194117 C 20050323; CN 1290309 A 20010404; EP 1102872 A1 20010530; EP 1102872 A4 20080430; JP 2002542397 A 20021210; KR 100298125 B1 20010529; KR 19990046683 A 19990705; RU 2181725 C2 20020427; TW 524881 B 20030321

INPADOC legal status


2009-11-18 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20090528

2009-02-18 [17Q] FIRST EXAMINATION REPORT

- Effective date: 20090116

2008-04-30 [A4] SUPPLEMENTARY SEARCH REPORT

- Effective date: 20080402

2001-05-30 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20000706

2001-05-30 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE