EP 1103031 A1 20010530 - SEMICONDUCTOR COMPONENT HAVING A PASSIVATION
Title (en)
SEMICONDUCTOR COMPONENT HAVING A PASSIVATION
Title (de)
HALBLEITERBAUELEMENT MIT PASSIVIERUNG
Title (fr)
COMPOSANT SEMI-CONDUCTEUR PRESENTANT UNE PASSIVATION
Publication
Application
Priority
- DE 9901982 W 19990701
- DE 19830832 A 19980709
Abstract (en)
[origin: WO0003345A1] The invention relates to a component having a passivation comprised of at least two passivation double layers of which the top layer is deposited on a planar surface of the layer located thereunder. The passivation double layers are comprised of two layers made of different dielectric materials, e.g. silicon oxide and silicon nitride. The respective thicknesses of the individual passivation layers can be adapted to the dimensions of the structuring of the layer on which the passivation is deposited. A reliable passivation is thus obtained which is especially suited for finger print sensors which measure in a capacitive manner.
IPC 1-7
IPC 8 full level
A61B 5/117 (2016.01); A61B 5/1172 (2016.01); G06K 9/00 (2006.01); G06T 1/00 (2006.01); H01L 21/312 (2006.01); H01L 21/314 (2006.01); H01L 29/94 (2006.01)
CPC (source: EP KR US)
G06V 40/1306 (2022.01 - EP US); H01L 21/02263 (2013.01 - EP); H01L 21/31 (2013.01 - KR); H01L 21/3145 (2016.02 - US); H01L 23/3192 (2013.01 - US)
Citation (search report)
See references of WO 0003345A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
WO 0003345 A1 20000120; BR 9911980 A 20010327; CN 1135493 C 20040121; CN 1308751 A 20010815; EP 1103031 A1 20010530; JP 2002520841 A 20020709; JP 3527708 B2 20040517; KR 100413860 B1 20040107; KR 20010071808 A 20010731; RU 2001103636 A 20040320; RU 2195048 C2 20021220; UA 46173 C2 20020515; US 2001019168 A1 20010906; US 6664612 B2 20031216
DOCDB simple family (application)
DE 9901982 W 19990701; BR 9911980 A 19990701; CN 99808413 A 19990701; EP 99945847 A 19990701; JP 2000559522 A 19990701; KR 20017000350 A 20010109; RU 2001103636 A 19990701; UA 01010171 A 19990701; US 75732801 A 20010109