EP 1103857 B1 20060920 - Optical system
Title (en)
Optical system
Title (de)
Optische Anordnung
Title (fr)
Système optique
Publication
Application
Priority
DE 19956353 A 19991124
Abstract (en)
[origin: EP1103857A2] The optical projection exposure device has an imaging light source and a refractive optical element, e.g. a lens (2), which is heated by the non-rotationally-symmetrical incident beam provided by the light source, with at least one electric heating element coupled to the optical element, provided by an resistance heating layer. The latter is optically-transparent over the surface (3) of the optical element receiving the incident beam and provided by a number of relatively insulated strips (5-10) coupled to a heating current source (17-19).
IPC 8 full level
G03F 7/20 (2006.01); G02B 1/10 (2015.01); G02B 1/11 (2015.01); G02B 3/00 (2006.01); G02B 7/02 (2006.01); G02B 7/18 (2006.01); G02B 13/14 (2006.01); H01L 21/027 (2006.01)
CPC (source: EP KR US)
G03F 7/20 (2013.01 - KR); G03F 7/70891 (2013.01 - EP US)
Designated contracting state (EPC)
DE FR NL
DOCDB simple family (publication)
EP 1103857 A2 20010530; EP 1103857 A3 20050323; EP 1103857 B1 20060920; DE 19956353 C1 20010809; DE 50013492 D1 20061102; JP 2001185483 A 20010706; KR 100753621 B1 20070829; KR 20010070228 A 20010725; US 6521877 B1 20030218
DOCDB simple family (application)
EP 00123292 A 20001027; DE 19956353 A 19991124; DE 50013492 T 20001027; JP 2000354003 A 20001121; KR 20000069201 A 20001121; US 72145100 A 20001122