EP 1109641 A1 20010627 - METHOD AND APPARATUS FOR PRODUCING MATERIAL VAPOUR
Title (en)
METHOD AND APPARATUS FOR PRODUCING MATERIAL VAPOUR
Title (de)
VERFAHREN UND VORRICHTUNG ZUR ERZEUGUNG VON MATERIALDAMPF
Title (fr)
PROCEDE ET APPAREIL DE PRODUCTION DE VAPEURS DE MATERIAUX
Publication
Application
Priority
- AU 9900588 W 19990721
- AU PP624798 A 19980721
Abstract (en)
[origin: WO0005017A1] An apparatus for producing material vapour for the production of powders or films comprises first (3) and second (4) electrodes mountable in a reaction vessel (2), and arranged to have a voltage applied to them to form an arc between them, the first electrode (3) being arranged to form at a part of the first electrode (9) a molten droplet or film (10) of a precursor material, when a precursor material (8) is moved towards the part, and wherein continued heating of the molten droplet or film causes vapourisation of material from the molten droplet or film to produce material vapour. The surface to volume ratio of the droplet or film (10) is selected in a manner such as to limit heat loss during an evaporation of material from the droplet or film, the heat loss being the portion of heat input into the surface of the droplet or film not used to evaporate material from the droplet or film.
IPC 1-7
B22F 9/16; C23C 14/24; C23C 14/26; B01J 19/08; B22F 9/14; B22F 9/12; C01B 13/32; C01B 31/30; C23C 14/32; C01B 21/072; C01F 7/42
IPC 8 full level
B01J 19/08 (2006.01); B22F 9/12 (2006.01); B22F 9/14 (2006.01); C01B 13/32 (2006.01); C01B 21/072 (2006.01); C01B 31/30 (2006.01); C01F 7/424 (2022.01); C23C 14/32 (2006.01)
CPC (source: EP)
B01J 19/088 (2013.01); B22F 9/12 (2013.01); B22F 9/14 (2013.01); C01B 13/326 (2013.01); C01B 21/0722 (2013.01); C01B 32/914 (2017.07); C01F 7/424 (2013.01); C23C 14/325 (2013.01); B01J 2219/0809 (2013.01); B01J 2219/0815 (2013.01); B01J 2219/0828 (2013.01); B01J 2219/083 (2013.01); B01J 2219/0832 (2013.01); B01J 2219/0835 (2013.01); B01J 2219/0841 (2013.01); B01J 2219/0877 (2013.01); B01J 2219/0886 (2013.01); B01J 2219/0898 (2013.01); B22F 2999/00 (2013.01); C01P 2006/60 (2013.01)
C-Set (source: EP)
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
WO 0005017 A1 20000203; EP 1109641 A1 20010627; EP 1109641 A4 20041006
DOCDB simple family (application)
AU 9900588 W 19990721; EP 99932548 A 19990721