EP 1112220 A1 20010704 - ROBOTS FOR MICROELECTRONIC WORKPIECE HANDLING
Title (en)
ROBOTS FOR MICROELECTRONIC WORKPIECE HANDLING
Title (de)
HANHABUNGSROBOTER FÜR MIKROELEKTRONISCHE WERKSTÜCKE
Title (fr)
ROBOTS DE MANIPULATION DE PIECES A USINER MICRO-ELECTRONIQUE
Publication
Application
Priority
- US 9915567 W 19990709
- US 11410598 A 19980711
Abstract (en)
[origin: WO0002808A1] An improved conveyor system (20) for transporting a microelectronic workpiece (w) within a processing tool (14, 16) is set forth. The conveyor system (20) includes a transport unit (30, 32) slidably guided on a conveyor rail (26) for transporting and manipulating the workpiece (w). The transport unit (30, 32) includes a vertical member (220) which is connected to a base end of a two section robot arm (100). The robot arm (100) includes an end effector (108) at a distal end thereof which is actuated to grip a surrounding edge of a workpiece (w). A first rotary actuator (200) is arranged to rotate the vertical member (220) about its axis to rotate the entire robot arm (100). A second rotary actuator (240) is positioned to rotate the second section (114) of the robot arm (100), via a belt, with respect to the first section (110) of the robot arm (100). A third rotary actuator (302) is arranged to rotate the end effector (108) about its horizontal axis. The third rotary actuator (302) permits the end effector (108) to flip the microelectronic workpiece (w) between a face up and a face down orientation.
IPC 1-7
IPC 8 full level
B25J 9/00 (2006.01); B25J 9/06 (2006.01); B25J 9/08 (2006.01); B25J 15/06 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); H01L 21/68 (2006.01); H01L 21/687 (2006.01)
CPC (source: EP KR)
B25J 9/0009 (2013.01 - EP); B25J 9/08 (2013.01 - EP); B65G 49/07 (2013.01 - KR); H01L 21/68707 (2013.01 - EP)
Citation (search report)
See references of WO 0002808A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
WO 0002808 A1 20000120; CN 1411420 A 20030416; EP 1112220 A1 20010704; JP 2003527737 A 20030916; KR 20010074695 A 20010809; TW 496848 B 20020801
DOCDB simple family (application)
US 9915567 W 19990709; CN 99810360 A 19990709; EP 99933843 A 19990709; JP 2000559045 A 19990709; KR 20017000407 A 20010110; TW 88111765 A 19990712