Global Patent Index - EP 1120817 B8

EP 1120817 B8 2007-10-10 - Use of a corrosion-resistant member

Title (en)

Use of a corrosion-resistant member

Title (de)

Verwendung eines korrosion beständigen Substratshalters

Title (fr)

Utilisation d'une porte substrat résistant à la corrosion

Publication

EP 1120817 B8 (EN)

Application

EP 01107373 A

Priority

  • EP 92302608 A
  • JP 8457591 A
  • JP 15093291 A
  • JP 25367891 A
  • JP 26230091 A
  • JP 5872792 A

Abstract (en)

[origin: US5306895A] An excellent corrosion resistant member of a ceramic heater for semiconductor production apparatuses to be exposed to a halogen series corrosive gas is provided. The corrosion resistant member uses one of an aluminum nitride and alumina sintered body as a substrate. A ceramic heater using the corrosion resistive member is also disclosed as well as a semiconductor heating device using the ceramic heater.

IPC 8 full level (invention and additional information)

H01L 21/00 (2006.01); C04B 35/581 (2006.01); C04B 41/50 (2006.01); C04B 41/85 (2006.01); C23C 16/44 (2006.01); C23C 16/458 (2006.01); H01L 21/683 (2006.01)

CPC (invention and additional information)

H01L 21/67103 (2013.01); C04B 35/581 (2013.01); C04B 41/009 (2013.01); C04B 41/5018 (2013.01); C04B 41/85 (2013.01); C23C 16/4581 (2013.01); C23C 16/4586 (2013.01); H01L 21/67115 (2013.01); H01L 21/6831 (2013.01)

Combination set (CPC)

  1. C04B 41/5018 + C04B 41/4533 + C04B 41/4556
  2. C04B 41/009 + C04B 35/10
  3. C04B 41/009 + C04B 35/581

Designated contracting state (EPC)

DE FR GB

EPO simple patent family

US 5306895 A 19940426; EP 1120817 A2 20010801; EP 1120817 A3 20020130; EP 1120817 B1 20070502; EP 1120817 B8 20071010

INPADOC legal status


2012-06-29 [PG25 GB] LAPSED IN A CONTRACTING STATE ANNOUNCED VIA POSTGRANT INFORM. FROM NAT. OFFICE TO EPO

- Ref Country Code: GB

- Free text: LAPSE BECAUSE OF EXPIRATION OF PROTECTION

- Effective date: 20120325

2012-04-30 [PG25 DE] LAPSED IN A CONTRACTING STATE ANNOUNCED VIA POSTGRANT INFORM. FROM NAT. OFFICE TO EPO

- Ref Country Code: DE

- Free text: LAPSE BECAUSE OF EXPIRATION OF PROTECTION

- Effective date: 20120327

2012-04-18 [REG GB PE20] PATENT EXPIRED AFTER TERMINATION OF 20 YEARS

- Expiry date: 20120325

2012-03-27 [REG DE R071] EXPIRY OF RIGHT

- Document: DE 69233692

2011-07-29 [PGFP GB] POSTGRANT: ANNUAL FEES PAID TO NATIONAL OFFICE

- Ref Country Code: GB

- Payment date: 20110221

- Year of fee payment: 20

2011-07-29 [PGFP DE] POSTGRANT: ANNUAL FEES PAID TO NATIONAL OFFICE

- Ref Country Code: DE

- Payment date: 20110331

- Year of fee payment: 20

2011-05-31 [PGFP FR] POSTGRANT: ANNUAL FEES PAID TO NATIONAL OFFICE

- Ref Country Code: FR

- Payment date: 20110304

- Year of fee payment: 20

2008-04-09 [26N] NO OPPOSITION FILED

- Effective date: 20080205

2007-12-14 [REG FR RM] CORRECTION OF A MATERIAL ERROR

2007-10-19 [ET] FR: TRANSLATION FILED

2007-10-10 [RIN2] INVENTOR (CORRECTION)

- Inventor name: USHIKOSHI, RYUSUKE C/O NGK INSULATORS, LTD.

2007-10-10 [RIN2] INVENTOR (CORRECTION)

- Inventor name: NOBORI, KAZUHIRO

2007-10-10 [RIN2] INVENTOR (CORRECTION)

- Inventor name: NIORI, YUSUKE C/0 NGK INSULATORS, LTD.

2007-10-10 [RIN2] INVENTOR (CORRECTION)

- Inventor name: UMEMOTO, KOICHI

2007-10-10 [RIN2] INVENTOR (CORRECTION)

- Inventor name: KOBAYASHI, HIROMICHI C/O NGK INSULATORS, LTD

2007-10-10 [RIN2] INVENTOR (CORRECTION)

- Inventor name: HONDA, TOSHIHIKO NGK INSULATORS, LTD

2007-10-10 [RIN2] INVENTOR (CORRECTION)

- Inventor name: KAWABATA, KENJI C/O NGK INSULATORS, LTD

2007-08-29 [RIN2] INVENTOR (CORRECTION)

- Inventor name: USHIKOSHI, RYUSUKE C/O NGK INSULATORS, LTD.

2007-08-29 [RIN2] INVENTOR (CORRECTION)

- Inventor name: NOBORI, KAZUHIRO

2007-08-29 [RIN2] INVENTOR (CORRECTION)

- Inventor name: NIORI, YUSUKE C/0 NGK INSULATORS, LTD.

2007-08-29 [RIN2] INVENTOR (CORRECTION)

- Inventor name: UMEMOTO, KOICHI

2007-08-29 [RIN2] INVENTOR (CORRECTION)

- Inventor name: HIROMICHI KOBAYASHI C/O NGK INSULATORS, LTD

2007-08-29 [RIN2] INVENTOR (CORRECTION)

- Inventor name: TOSHIHIKO HONDA NGK INSULATORS, LTD

2007-08-29 [RIN2] INVENTOR (CORRECTION)

- Inventor name: KENJI KAWABATA C/O NGK INSULATORS, LTD

2007-06-14 [REF] CORRESPONDS TO:

- Document: DE 69233692 P 20070614

2007-05-02 [AC] DIVISIONAL APPLICATION (ART. 76) OF:

- Document: EP 0506391 P

2007-05-02 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: B1

- Designated State(s): DE FR GB

2007-05-02 [REG GB FG4D] EUROPEAN PATENT GRANTED

2006-08-16 [RTI1] TITLE (CORRECTION)

- Free text: USE OF A CORROSION-RESISTANT MEMBER

2005-03-02 [17Q] FIRST EXAMINATION REPORT

- Effective date: 20041114

2002-10-16 [AKX] PAYMENT OF DESIGNATION FEES

- Free text: DE FR GB

2002-09-11 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20020712

2002-02-13 [RIN1] INVENTOR (CORRECTION)

- Inventor name: USHIKOSHI, RYUSUKE C/O NGK INSULATORS, LTD.

2002-02-13 [RIN1] INVENTOR (CORRECTION)

- Inventor name: NOBORI, KAZUHIRO

2002-02-13 [RIN1] INVENTOR (CORRECTION)

- Inventor name: NIORI, YUSUKE C/0 NGK INSULATORS, LTD.

2002-02-13 [RIN1] INVENTOR (CORRECTION)

- Inventor name: UMEMOTO, KOICHI

2002-01-30 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A3

- Designated State(s): DE FR GB

2002-01-30 [RIC1] CLASSIFICATION (CORRECTION)

- Free text: 7H 01L 21/00 A, 7C 23C 16/44 B, 7C 04B 41/50 B, 7C 23C 16/458 B

2001-08-22 [RIN1] INVENTOR (CORRECTION)

- Inventor name: USHIKOSHI, RYUSUKE

2001-08-22 [RIN1] INVENTOR (CORRECTION)

- Inventor name: NOBORI, KAZUHIRO

2001-08-22 [RIN1] INVENTOR (CORRECTION)

- Inventor name: NIORI, YUSUKE

2001-08-22 [RIN1] INVENTOR (CORRECTION)

- Inventor name: UMEMOTO, KOICHI

2001-08-01 [AC] DIVISIONAL APPLICATION (ART. 76) OF:

- Document: EP 506391

2001-08-01 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A2

- Designated State(s): DE FR GB