EP 1120817 B8 20071010 - Use of a corrosion-resistant member
Title (en)
Use of a corrosion-resistant member
Title (de)
Verwendung eines korrosion beständigen Substratshalters
Title (fr)
Utilisation d'une porte substrat résistant à la corrosion
Publication
Application
Priority
- EP 92302608 A 19920326
- JP 8457591 A 19910326
- JP 15093291 A 19910528
- JP 25367891 A 19911001
- JP 26230091 A 19911009
- JP 5872792 A 19920213
Abstract (en)
[origin: US5306895A] An excellent corrosion resistant member of a ceramic heater for semiconductor production apparatuses to be exposed to a halogen series corrosive gas is provided. The corrosion resistant member uses one of an aluminum nitride and alumina sintered body as a substrate. A ceramic heater using the corrosion resistive member is also disclosed as well as a semiconductor heating device using the ceramic heater.
IPC 8 full level
H01L 21/00 (2006.01); C04B 35/581 (2006.01); C04B 41/50 (2006.01); C04B 41/85 (2006.01); C23C 16/44 (2006.01); C23C 16/458 (2006.01); H01L 21/683 (2006.01)
CPC (source: EP US)
C04B 35/581 (2013.01 - EP US); C04B 41/009 (2013.01 - EP US); C04B 41/5018 (2013.01 - EP US); C04B 41/85 (2013.01 - EP US); C23C 16/4581 (2013.01 - EP US); C23C 16/4586 (2013.01 - EP US); H01L 21/67103 (2013.01 - EP US); H01L 21/67115 (2013.01 - EP US); H01L 21/6831 (2013.01 - EP US)
C-Set (source: EP US)
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
US 5306895 A 19940426; EP 1120817 A2 20010801; EP 1120817 A3 20020130; EP 1120817 B1 20070502; EP 1120817 B8 20071010
DOCDB simple family (application)
US 85796892 A 19920326; EP 01107373 A 19920326