EP 1122526 B1 20060503 - Thermal infrared detector provided with shield for high fill factor
Title (en)
Thermal infrared detector provided with shield for high fill factor
Title (de)
Thermischer Infrarotdetektor mit einem Schild zur Verbesserung des Füllfaktors
Title (fr)
Détecteur thermique à infrarouge comportant un écran pour améliorer le facteur de remplissage
Publication
Application
Priority
JP 2000022862 A 20000131
Abstract (en)
[origin: EP1122526A2] An infrared photosensitive area is constituted by an infrared ray absorbing part that is heated by infrared rays, a thermal detector that detects the temperature change of the infrared ray absorbing part, and electrodes that are electrically connected to the thermal detector. The infrared photosensitive area is held up above one surface of a substrate by supports. The electrodes of the infrared photosensitive area are electrically connected to contact pads on the substrate by wiring material that constitutes the support. A shield projects from portions of the infrared ray absorbing part other than portions that correspond to the electrodes. The contact pads of the substrate and the surfaces of the electrodes and the supports that are directed away from the substrate are covered by the shield with an interposed space. This configuration enables an increase in the fill factor of the picture elements of the thermal infrared detector and enables greater absorption of infrared light. <IMAGE>
IPC 8 full level
G01J 1/02 (2006.01); G01J 5/20 (2006.01); G01J 1/00 (2006.01); G01J 5/02 (2006.01); G01J 5/08 (2006.01); G01J 5/10 (2006.01); G01J 5/12 (2006.01); G01J 5/34 (2006.01); H01L 27/14 (2006.01)
CPC (source: EP KR US)
G01J 1/00 (2013.01 - KR); G01J 5/02 (2013.01 - EP); G01J 5/0215 (2013.01 - EP US); G01J 5/0225 (2013.01 - EP US); G01J 5/0235 (2013.01 - EP US); G01J 5/024 (2013.01 - EP US); G01J 5/05 (2022.01 - US); G01J 5/08 (2013.01 - EP); G01J 5/0801 (2022.01 - US); G01J 5/0853 (2013.01 - EP US); G01J 5/20 (2013.01 - EP US); G01J 5/046 (2013.01 - EP US); G01J 2005/0077 (2013.01 - EP US)
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
EP 1122526 A2 20010808; EP 1122526 A3 20031119; EP 1122526 B1 20060503; DE 60119185 D1 20060608; DE 60119185 T2 20070222; JP 2001215151 A 20010810; JP 3921320 B2 20070530; KR 100386484 B1 20030602; KR 20010087165 A 20010915; US 2001010360 A1 20010802; US 6448557 B2 20020910
DOCDB simple family (application)
EP 01102043 A 20010130; DE 60119185 T 20010130; JP 2000022862 A 20000131; KR 20010004210 A 20010130; US 77187901 A 20010130