EP 1126506 A3 20060111 - Apparatus and method for robotic alignment of substrates
Title (en)
Apparatus and method for robotic alignment of substrates
Title (de)
Verfahren und Vorrichtung zur robotischen Ausrichtung von Substraten
Title (fr)
Méthode et dispositif d'alignement de substrats à l'aide d'un robot
Publication
Application
Priority
US 47082199 A 19991223
Abstract (en)
[origin: EP1126506A2] The disclosure relates to a robot device (112) that either translationally or rotationally aligns a substrate (150) with a slot (174). For translational alignment, the robot device comprises a position sensor positioned in close proximity to the slot. The translational position sensor (170) determines the position of the object by moving the object parallel to the slot until it actuates the position sensor. For rotational alignment, two position sensors (140ba, 140bb) are provided that determine the relative angle between the object and a portion of the robot device and the object.
IPC 8 full level
B25J 9/06 (2006.01); B25J 9/10 (2006.01); H01L 21/00 (2006.01); H01L 21/68 (2006.01); H01L 21/687 (2006.01)
CPC (source: EP KR US)
H01L 21/67259 (2013.01 - EP US); H01L 21/68 (2013.01 - EP KR US); H01L 21/681 (2013.01 - EP US); H01L 21/68707 (2013.01 - EP US)
Citation (search report)
- [X] EP 0597637 A1 19940518 - APPLIED MATERIALS INC [US]
- [X] WO 9902996 A2 19990121 - GENMARK AUTOMATION [US]
- [X] PATENT ABSTRACTS OF JAPAN vol. 1999, no. 03 31 March 1999 (1999-03-31)
- [X] PATENT ABSTRACTS OF JAPAN vol. 1998, no. 11 30 September 1998 (1998-09-30)
- [X] PATENT ABSTRACTS OF JAPAN vol. 1997, no. 09 30 September 1997 (1997-09-30)
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
EP 1126506 A2 20010822; EP 1126506 A3 20060111; JP 2001244316 A 20010907; KR 100753290 B1 20070829; KR 20010062625 A 20010707; SG 90220 A1 20020723; US 6577923 B1 20030610
DOCDB simple family (application)
EP 00311440 A 20001220; JP 2000393003 A 20001225; KR 20000080200 A 20001222; SG 200007529 A 20001219; US 47082199 A 19991223