EP 1127378 A1 20010829 - FERROELECTRIC THIN FILMS OF REDUCED TETRAGONALITY
Title (en)
FERROELECTRIC THIN FILMS OF REDUCED TETRAGONALITY
Title (de)
FERROELEKTRISCHE DÜNNSCHICHTEN MIT REDUZIERTER TETRAPONALITÄT
Title (fr)
FILMS FERROELECTRIQUES MINCES A TETRAGONALITE REDUITE
Publication
Application
Priority
- US 9922178 W 19990924
- US 16077898 A 19980924
Abstract (en)
[origin: WO0017936A1] A ferroelectric material, especially as incorporated into a crystallographically oriented epitaxial ferroelectric cell, of Pb1-xLaxZryTi1-yO3 or Pb1-xNbxZryTi1-yO3 having a moderately high La or Nb content such that the unit cell is less tetragonal, that is, more nearly cubic, so as to reduce stress effects. A most preferred value of the c/a constant is about 1.01. Exemplary compositional ranges for x are 6 to 20 % for La and 3 to 15 % for Nb, when y is 20 %. The reduced polarizabilities voltages are consistent with integrated ferrroelectric memories operating at 3.0V and lower.
IPC 1-7
H01L 29/76; H01L 29/94; H01L 31/062; H01L 31/113; H01L 31/119
IPC 8 full level
G11C 11/22 (2006.01); H01L 21/316 (2006.01); H01L 21/8246 (2006.01); H01L 27/105 (2006.01); H01L 27/115 (2006.01); H01L 29/51 (2006.01); H01L 21/02 (2006.01)
CPC (source: EP KR US)
H01L 21/02197 (2013.01 - EP); H01L 27/105 (2013.01 - KR); H01L 29/516 (2013.01 - EP); H10B 53/00 (2023.02 - EP US); H01L 28/56 (2013.01 - EP)
Citation (search report)
See references of WO 0017936A1
Designated contracting state (EPC)
DE FR GB IT NL
DOCDB simple family (publication)
WO 0017936 A1 20000330; AU 6161599 A 20000410; CA 2343129 A1 20000330; CN 1319256 A 20011024; EP 1127378 A1 20010829; ID 27451 A 20010412; JP 2002525876 A 20020813; KR 20010075336 A 20010809; MX PA01002814 A 20020408; TW 445647 B 20010711
DOCDB simple family (application)
US 9922178 W 19990924; AU 6161599 A 19990924; CA 2343129 A 19990924; CN 99811267 A 19990924; EP 99948440 A 19990924; ID 20010696 A 19990924; JP 2000571502 A 19990924; KR 20017003753 A 20010323; MX PA01002814 A 19990924; TW 88116395 A 19991120