EP 1130269 B1 20060913 - Turbo-molecular pump
Title (en)
Turbo-molecular pump
Title (de)
Turbomolekularpumpe
Title (fr)
Pompe turbo-moléculaire
Publication
Application
Priority
DE 10010371 A 20000302
Abstract (en)
[origin: EP1130269A2] Pump has rotor (4) and stator (6) plates arranged alternately in series and distance rings (8) for stator plates forming stator packet with stator plates. An elastically deformable metal element (16) is arranged between at least two of distance rings and forms part of stator packet. An axial groove (14) machined into at least no distance ring accommodates an elastically deformable metal element.
IPC 8 full level
F04D 19/04 (2006.01); F04D 29/54 (2006.01); F04D 29/64 (2006.01)
CPC (source: EP US)
F04D 19/042 (2013.01 - EP US)
Designated contracting state (EPC)
CH DE FR GB IT LI NL
DOCDB simple family (publication)
EP 1130269 A2 20010905; EP 1130269 A3 20021030; EP 1130269 B1 20060913; DE 10010371 A1 20010906; DE 50110975 D1 20061026; JP 2001271786 A 20011005; US 2001019694 A1 20010906; US 6454525 B2 20020924
DOCDB simple family (application)
EP 01102551 A 20010206; DE 10010371 A 20000302; DE 50110975 T 20010206; JP 2001036788 A 20010214; US 79244201 A 20010223