EP 1135667 A1 20010926 - THIN FILM STRAIN SENSORS BASED ON INTERFEROMETRIC OPTICAL MEASUREMENTS
Title (en)
THIN FILM STRAIN SENSORS BASED ON INTERFEROMETRIC OPTICAL MEASUREMENTS
Title (de)
DÜNNSCHICHTDEFORMATIONSSENSOREN FÜR INTERFEROMETRISCH-OPTISCHEN MESSUNGEN
Title (fr)
CAPTEURS DE CONTRAINTE A FILM MINCE POUR MESURES OPTIQUES INTERFEROMETRIQUES
Publication
Application
Priority
- US 9919601 W 19990825
- US 9798998 P 19980826
Abstract (en)
[origin: WO0012960A1] The invention relates to polymeric/semiconductor thin film strain gauges comprising visible light from spectrometer (10) which is directed onto a thin film passive sensor (12) having a transparent glass substrate (14) and a laminated construction in succession from the substrate (14), of a polyimide layer (18a), a polysiloxane layer (16a) filled with alumina particles, a polyimide layer (18b) and a polysiloxane layer (16b) filled with alumina particles.
IPC 1-7
IPC 8 full level
G01B 11/16 (2006.01); G01L 1/24 (2006.01)
CPC (source: EP KR)
Citation (search report)
See references of WO 0012960A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
WO 0012960 A1 20000309; AU 5694999 A 20000321; AU 745103 B2 20020314; CA 2341166 A1 20000309; CN 1314990 A 20010926; EP 1135667 A1 20010926; JP 2002523764 A 20020730; KR 20010072920 A 20010731
DOCDB simple family (application)
US 9919601 W 19990825; AU 5694999 A 19990825; CA 2341166 A 19990825; CN 99810062 A 19990825; EP 99943961 A 19990825; JP 2000567901 A 19990825; KR 20017002341 A 20010224