Global Patent Index - EP 1135792 A4

EP 1135792 A4 20050608 - METHOD FOR MANUFACTURING CARBON NANOTUBES AS FUNCTIONAL ELEMENTS OF MEMS DEVICES

Title (en)

METHOD FOR MANUFACTURING CARBON NANOTUBES AS FUNCTIONAL ELEMENTS OF MEMS DEVICES

Title (de)

VERFAHREN ZUR HERSTELLUNG VON NANORÖHREN AUS KOHLENSTOFF ALS FUNKTIONELLE ELEMENTE VON MEMS-BAUELEMENTEN

Title (fr)

PROCEDE DE FABRICATION DE NANOTUBES DE CARBONE COMME ELEMENTS FONCTIONNELS DE DISPOSITIFS A SYSTEME DE FABRICATION ELECTROMECANIQUE (MEMS)

Publication

EP 1135792 A4 20050608 (EN)

Application

EP 99949896 A 19990928

Priority

  • CA 2308015 A 20000511
  • US 9922334 W 19990928
  • US 10215998 P 19980928

Abstract (en)

[origin: WO0019494A1] A system and method for manufacturing carbon nanotubes as functional elements of MEMS devices. The method of the present invention comprises the steps of preparing a MEMS substrate for synthesis of a carbon nanotube. A nanosize hole or catalyst retaining structure is fabricated on the MEMS substrate in which a nanotube catalyst is deposited. A nanotube is then synthesized within the nanosize hole.

IPC 1-7

H01L 21/00; H01J 1/14; H01J 19/24; B81C 3/00; G12B 21/02; G12B 21/08; C01B 31/02

IPC 8 full level

B81C 3/00 (2006.01); B81C 5/00 (2006.01); B81C 99/00 (2010.01); C01B 31/02 (2006.01); C23C 14/06 (2006.01); C23C 16/26 (2006.01); G01N 13/16 (2006.01); G01Q 60/24 (2010.01); G01Q 70/12 (2010.01); G01Q 70/16 (2010.01); G11C 23/00 (2006.01); G12B 21/02 (2006.01); G12B 21/08 (2006.01); H01J 9/02 (2006.01)

CPC (source: EP)

G01Q 70/12 (2013.01); G11C 23/00 (2013.01)

Citation (search report)

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

DOCDB simple family (publication)

WO 0019494 A1 20000406; AU 6267299 A 20000417; CA 2308015 A1 20011111; EP 1135792 A1 20010926; EP 1135792 A4 20050608; JP 2002526354 A 20020820

DOCDB simple family (application)

US 9922334 W 19990928; AU 6267299 A 19990928; CA 2308015 A 20000511; EP 99949896 A 19990928; JP 2000572903 A 19990928