EP 1135792 A4 20050608 - METHOD FOR MANUFACTURING CARBON NANOTUBES AS FUNCTIONAL ELEMENTS OF MEMS DEVICES
Title (en)
METHOD FOR MANUFACTURING CARBON NANOTUBES AS FUNCTIONAL ELEMENTS OF MEMS DEVICES
Title (de)
VERFAHREN ZUR HERSTELLUNG VON NANORÖHREN AUS KOHLENSTOFF ALS FUNKTIONELLE ELEMENTE VON MEMS-BAUELEMENTEN
Title (fr)
PROCEDE DE FABRICATION DE NANOTUBES DE CARBONE COMME ELEMENTS FONCTIONNELS DE DISPOSITIFS A SYSTEME DE FABRICATION ELECTROMECANIQUE (MEMS)
Publication
Application
Priority
- CA 2308015 A 20000511
- US 9922334 W 19990928
- US 10215998 P 19980928
Abstract (en)
[origin: WO0019494A1] A system and method for manufacturing carbon nanotubes as functional elements of MEMS devices. The method of the present invention comprises the steps of preparing a MEMS substrate for synthesis of a carbon nanotube. A nanosize hole or catalyst retaining structure is fabricated on the MEMS substrate in which a nanotube catalyst is deposited. A nanotube is then synthesized within the nanosize hole.
IPC 1-7
H01L 21/00; H01J 1/14; H01J 19/24; B81C 3/00; G12B 21/02; G12B 21/08; C01B 31/02
IPC 8 full level
B81C 3/00 (2006.01); B81C 99/00 (2010.01); C01B 31/02 (2006.01); C23C 14/06 (2006.01); C23C 16/26 (2006.01); G01Q 60/24 (2010.01); G01Q 70/12 (2010.01); G01Q 70/16 (2010.01); G11C 23/00 (2006.01); H01J 9/02 (2006.01)
CPC (source: EP)
G01Q 70/12 (2013.01); G11C 23/00 (2013.01)
Citation (search report)
- [X] WO 9839250 A1 19980911 - UNIV RICE WILLIAM M [US], et al
- [XP] EP 0913508 A2 19990506 - CANON KK [JP]
- [E] EP 0951047 A2 19991020 - CANON KK [JP]
- See references of WO 0019494A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
WO 0019494 A1 20000406; AU 6267299 A 20000417; CA 2308015 A1 20011111; EP 1135792 A1 20010926; EP 1135792 A4 20050608; JP 2002526354 A 20020820
DOCDB simple family (application)
US 9922334 W 19990928; AU 6267299 A 19990928; CA 2308015 A 20000511; EP 99949896 A 19990928; JP 2000572903 A 19990928