EP 1137321 A1 20010926 - CERAMIC HEATER
Title (en)
CERAMIC HEATER
Title (de)
KERAMISCHES HEIZELEMENT
Title (fr)
APPAREIL CHAUFFANT EN CERAMIQUE
Publication
Application
Priority
- JP 0000818 W 20000215
- JP 34128499 A 19991130
- JP 34706599 A 19991207
Abstract (en)
To provide a ceramic heater capable of reducing temperature uniformity at the periphery of through holes such as insertion holes and vacuum suction holes, thereby protecting the wafer against thermal shocks and having improved controllability for temperature control parts such as thermocouples and temperature fuse. Further, a ceramic heater capable of uniform resin curing is provided. A heat generation body 14 is disposed on the surface or inside of the ceramic substrate 12. Further, corners for the insertion holes 16, the recesses 18 and the vacuum suction holes 20 of the ceramic substrate 12 are chamfered. <IMAGE>
IPC 1-7
IPC 8 full level
H01L 21/00 (2006.01)
CPC (source: EP US)
H01L 21/67103 (2013.01 - EP US)
Citation (search report)
See references of WO 0141508A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
US 2003136776 A1 20030724; EP 1137321 A1 20010926; US 2002043527 A1 20020418; US 2004173598 A1 20040909; US 6639188 B2 20031028; US 6917020 B2 20050712; WO 0141508 A1 20010607
DOCDB simple family (application)
US 35651903 A 20030203; EP 00902968 A 20000215; JP 0000818 W 20000215; US 80388304 A 20040319; US 91541801 A 20010727