EP 1137514 B1 20021218 - MODULAR MACHINE FOR POLISHING AND PLANING SUBSTRATES
Title (en)
MODULAR MACHINE FOR POLISHING AND PLANING SUBSTRATES
Title (de)
BAUKASTENSYSTEM POLIERMASCHINE UND SUBSTRAT PLANARISIERUNG
Title (fr)
MACHINE MODULAIRE DE POLISSAGE ET DE PLANARISATION DE SUBSTRATS
Publication
Application
Priority
- FR 9900739 W 19990330
- FR 9804202 A 19980331
Abstract (en)
[origin: US6343979B1] The invention concerns a polishing machine comprising at least a base unit (10) in the form of a parallelepiped cell (12), with a first loading and unloading surface (14), a second opposite parallel surface (16) for access to the working zone located in an intermediate section (24), and third and fourth surfaces (18, 20). The loading pallet board (48) and unloading pallet board (56) are respectively borne by a loading arm (50) and an unloading arm (58) operating independently of each other, said pallet boards being both accessible on the first surface (14) side. The mechanism (28, 30) is located in the lower section beneath the cell (12) intermediate section (24), while the automaton is arranged in the top section, the mechanism and the automaton being accessible on the second surface (16) side.
IPC 1-7
IPC 8 full level
B24B 37/04 (2012.01); B23Q 39/04 (2006.01); B24B 37/27 (2012.01); B24B 37/34 (2012.01); B24B 41/02 (2006.01); B24B 53/007 (2006.01); B24B 53/017 (2012.01); H01L 21/304 (2006.01)
CPC (source: EP KR US)
B24B 37/30 (2013.01 - KR); B24B 37/345 (2013.01 - EP KR US); B24B 41/02 (2013.01 - EP KR US); B24B 53/017 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE DE FR GB IT NL
DOCDB simple family (publication)
US 6343979 B1 20020205; AT E229867 T1 20030115; CN 1134323 C 20040114; CN 1296434 A 20010523; DE 69904647 D1 20030130; EP 1137514 A1 20011004; EP 1137514 B1 20021218; FR 2776552 A1 19991001; FR 2776552 B1 20000616; JP 2002509812 A 20020402; KR 100531987 B1 20051130; KR 20010078700 A 20010821; WO 9950023 A1 19991007
DOCDB simple family (application)
US 64695600 A 20000925; AT 99937813 T 19990330; CN 99804635 A 19990330; DE 69904647 T 19990330; EP 99937813 A 19990330; FR 9804202 A 19980331; FR 9900739 W 19990330; JP 2000540971 A 19990330; KR 20007010773 A 20000928