EP 1139526 A3 20020116 - Dopant diffusion blocking for optoelectronic devices using InAlAs or InGaAlAs
Title (en)
Dopant diffusion blocking for optoelectronic devices using InAlAs or InGaAlAs
Title (de)
Dotierungsdiffusionssperrschicht für optoelektronische Vorichtungen unter Verwendung von InAlAs oder InGaAlAs
Title (fr)
Couche arrêtant la diffusion de dopage pour dispositifs optoélectronique utilisant InAlAs ou InGaAlAs
Publication
Application
Priority
US 53988200 A 20000331
Abstract (en)
[origin: EP1139526A2] A method for decreasing the diffusion of dopant atoms in the active region, as well as the interdiffusion of different types of dopant atoms among adjacent doped regions, of optoelectronic devices is disclosed. The method of the present invention employs a plurality of InAlAs and/or InGaAlAs layers to avoid the direct contact between the dopant atoms and the active region, and between the dopant atoms in adjacent blocking structures of optoelectronic devices. A semi-insulating buried ridge structure, as well as a ridge structure, in which the interdiffusion of different types of dopant atoms is suppressed are also disclosed. <IMAGE>
IPC 1-7
IPC 8 full level
G02F 1/025 (2006.01); H01L 31/10 (2006.01); H01S 5/227 (2006.01); H01S 5/50 (2006.01); H01S 5/22 (2006.01)
CPC (source: EP US)
H01S 5/227 (2013.01 - EP US); G02F 1/025 (2013.01 - EP US); H01S 5/221 (2013.01 - EP US); H01S 5/2213 (2013.01 - EP US); H01S 5/2226 (2013.01 - EP US); H01S 5/3072 (2013.01 - EP US); H01S 5/50 (2013.01 - EP US)
Citation (search report)
- [XA] US 5822349 A 19981013 - TAKAOKA KEIJI [JP], et al
- [XA] US 5717710 A 19980210 - MIYAZAKI YASUNORI [JP], et al
- [XA] US 5804840 A 19980908 - OCHI SEIJI [JP], et al
- [A] US 6011811 A 20000104 - OEHLANDER ULF [SE], et al
- [XA] JIE W Z ET AL: "NATIVE-OXIDIZED INALAS BLOCKING LAYER BURIED HETEROSTRUCTURE INGAASP-INP MQW LASER FOR HIGH-TEMPERATURE OPERATION", IEEE PHOTONICS TECHNOLOGY LETTERS, IEEE INC. NEW YORK, US, vol. 11, no. 1, January 1999 (1999-01-01), pages 3 - 5, XP000801374, ISSN: 1041-1135
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
EP 1139526 A2 20011004; EP 1139526 A3 20020116; CA 2342518 A1 20010930; JP 2001352131 A 20011221; US 2003209771 A1 20031113; US 2004213313 A1 20041028; US 6664605 B1 20031216
DOCDB simple family (application)
EP 01303131 A 20010402; CA 2342518 A 20010330; JP 2001101591 A 20010330; US 45943903 A 20030612; US 53988200 A 20000331; US 84835304 A 20040519