EP 1141611 B1 20031105 - SYSTEM FOR CONVEYING LIQUIDS WITHOUT PULSING
Title (en)
SYSTEM FOR CONVEYING LIQUIDS WITHOUT PULSING
Title (de)
SYSTEM ZUR PULSATIONSFREIEN FÖRDERUNG VON FLÜSSIGKEITEN
Title (fr)
SYSTEME DE TRANSPORT DE LIQUIDES SANS PULSATION
Publication
Application
Priority
- DE 19857593 A 19981214
- EP 9909408 W 19991202
Abstract (en)
[origin: US6623248B1] A system tot the pulsation-free delivery of liquids, which system may be used for high-purity, liquid chemicals in the semiconductor industry.
IPC 1-7
IPC 8 full level
F04B 11/00 (2006.01); F04B 9/129 (2006.01); F16L 55/04 (2006.01); F16L 55/05 (2006.01); F17D 1/12 (2006.01); H01L 21/02 (2006.01)
CPC (source: EP US)
F04B 9/129 (2013.01 - EP US); Y10T 137/0396 (2015.04 - EP US); Y10T 137/2365 (2015.04 - EP US); Y10T 137/4673 (2015.04 - EP US)
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
US 6623248 B1 20030923; AT E253709 T1 20031115; DE 19857593 A1 20000615; DE 59907661 D1 20031211; EP 1141611 A1 20011010; EP 1141611 B1 20031105; JP 2002532656 A 20021002; TW 469323 B 20011221; WO 0036329 A1 20000622
DOCDB simple family (application)
US 85769201 A 20010608; AT 99957334 T 19991202; DE 19857593 A 19981214; DE 59907661 T 19991202; EP 9909408 W 19991202; EP 99957334 A 19991202; JP 2000588535 A 19991202; TW 88121512 A 19991208