EP 1141996 A1 20011010 - HOLLOW CATHODE ARRAY FOR PLASMA GENERATION
Title (en)
HOLLOW CATHODE ARRAY FOR PLASMA GENERATION
Title (de)
HOHLKATHODENMATRIX FÜR PLASMAERZEUGUNG
Title (fr)
MATRICE CATHODIQUE CREUSE POUR GENERATION DE PLASMA
Publication
Application
Priority
- US 9928841 W 19991206
- US 11111698 P 19981207
Abstract (en)
[origin: WO0034979A1] This invention relates to a cathode assembly for use in the creation of a discharge plasma. The cathode comprises a plurality of electrically conductive hollow plasma generating cells in an array, the cells being electrically connected to each other. The plasma generated can be used to modify surface properties of substrates, such as films, fibers, particles and other articles.
IPC 1-7
IPC 8 full level
B01J 19/08 (2006.01); C08J 7/00 (2006.01); H01J 37/32 (2006.01); H05H 1/24 (2006.01)
CPC (source: EP KR)
H01J 17/00 (2013.01 - KR); H01J 37/32009 (2013.01 - EP); H01J 37/32596 (2013.01 - EP)
Citation (search report)
See references of WO 0034979A1
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
WO 0034979 A1 20000615; AU 1842200 A 20000626; CA 2348653 A1 20000615; CN 1331836 A 20020116; EP 1141996 A1 20011010; JP 2002532828 A 20021002; KR 20010101137 A 20011114; TW 470995 B 20020101
DOCDB simple family (application)
US 9928841 W 19991206; AU 1842200 A 19991206; CA 2348653 A 19991206; CN 99814158 A 19991206; EP 99961943 A 19991206; JP 2000587353 A 19991206; KR 20017007066 A 20010607; TW 88121388 A 19991207