EP 1142027 A1 20011010 - REDUCED DIFFUSION OF A MOBILE SPECIE FROM A METAL OXIDE CERAMIC
Title (en)
REDUCED DIFFUSION OF A MOBILE SPECIE FROM A METAL OXIDE CERAMIC
Title (de)
VERRINGERTE DIFFUSION EINES BEWEGLICHEN STOFFS AUS EINER METALLOXID-KERAMIK
Title (fr)
REDUCTION DE LA DIFFUSION D'ELEMENTS MOBILES DE CERAMIQUE D'OXYDE METALLIQUE
Publication
Application
Priority
- IB 9902028 W 19991208
- US 21637298 A 19981218
Abstract (en)
[origin: WO0038247A1] A barrier layer is provided to prevent the diffusion of excess mobile specie from a metal oxide ceramic into the substrate. The barrier layer is provided below the metal oxide ceramic, separating it from the substrate below.
IPC 1-7
IPC 8 full level
C23C 14/08 (2006.01); H01L 21/02 (2006.01); H01L 21/28 (2006.01); H01L 21/768 (2006.01); H01L 21/8246 (2006.01); H01L 27/105 (2006.01)
CPC (source: EP KR)
H01L 27/105 (2013.01 - KR); H01L 28/55 (2013.01 - EP); H01L 28/75 (2013.01 - EP); H10B 53/00 (2023.02 - EP); H10B 53/30 (2023.02 - EP)
Citation (search report)
See references of WO 0038247A1
Designated contracting state (EPC)
DE FR GB IE IT
DOCDB simple family (publication)
WO 0038247 A1 20000629; CN 1199287 C 20050427; CN 1330798 A 20020109; EP 1142027 A1 20011010; JP 2003536239 A 20031202; KR 20010086116 A 20010907; TW 478176 B 20020301
DOCDB simple family (application)
IB 9902028 W 19991208; CN 99814615 A 19991208; EP 99958444 A 19991208; JP 2000590226 A 19991208; KR 20017007678 A 20010618; TW 88122022 A 19991215