EP 1144715 A3 20021127 - DIFFUSION BARRIER LAYER WITH A HIGH BARRIER EFFECT
Title (en)
DIFFUSION BARRIER LAYER WITH A HIGH BARRIER EFFECT
Title (de)
DIFFUSIONSSPERRSCHICHT
Title (fr)
COUCHE BARRIERE DE DIFFUSION AVEC EFFET BARRIERE IMPORTANT
Publication
Application
Priority
- CH 9900575 W 19991201
- CH 238698 A 19981201
Abstract (en)
[origin: US6686302B1] The invention relates to an organic diffusion barrier layer (58) applied to a substrate (44). Said barrier layer has an apolar skeletal structure and a high barrier effect with respect to volatile gases, vapors and liquids. The diffusion barrier layer (58) consists of a hydrocarbon polymer that is produced by means of plasma polymerization. It respectively contains 0.01-6 at % of at least one element from the group consisting of oxygen, nitrogen, fluorine, bromine, boron and silicon, whereby the total amount of said elements does not exceed 12 at %. The barrier effect of the diffusion barrier layer (58) is produced by means of at least one pulsed or continuous DC magnetron sputtering source plasma (26) or by means of inductively excited, pulsed or continuous microwave discharge (20).
IPC 1-7
IPC 8 full level
B05D 7/24 (2006.01)
CPC (source: EP US)
B05D 1/62 (2013.01 - EP US); Y10T 428/24995 (2015.04 - EP US); Y10T 428/31993 (2015.04 - EP US); Y10T 442/3854 (2015.04 - EP US); Y10T 442/674 (2015.04 - EP US)
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
WO 0032838 A2 20000608; WO 0032838 A3 20021010; AT E229095 T1 20021215; AU 1256900 A 20000619; BR 9916152 A 20010904; CA 2347829 A1 20000608; DE 59903693 D1 20030116; EP 1144715 A2 20011017; EP 1144715 A3 20021127; EP 1144715 B1 20021204; US 6686302 B1 20040203
DOCDB simple family (application)
CH 9900575 W 19991201; AT 99955637 T 19991201; AU 1256900 A 19991201; BR 9916152 A 19991201; CA 2347829 A 19991201; DE 59903693 T 19991201; EP 99955637 A 19991201; US 85640501 A 20010521