Global Patent Index - EP 1145284 A3

EP 1145284 A3 2002-09-11 - METHOD AND DEVICE FOR DRYING PHOTORESIST COATINGS

Title (en)

METHOD AND DEVICE FOR DRYING PHOTORESIST COATINGS

Title (de)

VERFAHREN UND VORRICHTUNG ZUR TROCKNUNG VON PHOTORESISTSCHICHTEN

Title (fr)

PROCEDE ET DISPOSITIF DE SECHAGE DE COUCHES PHOTORESISTANTES

Publication

EP 1145284 A3 (DE)

Application

EP 99936266 A

Priority

  • DE 9901485 W
  • DE 19821237 A

Abstract (en)

[origin: WO9959191A2] The present invention relates to a method and device for drying photoresist coatings. A substrate (12) provided with the photoresist coating is impinged upon by infrared radiation from an infrared radiation source (4) with an adjustable output. The temperature of the area around the photresist layer is measured during drying. The output of the infrared radiation source is temperature-controlled so as to achieve a specific chronological temperature cycle. For this purpose, the inventive device is provided with a control unit (8) and a temperature measuring device (6, 7). The inventive method and device pertaining thereto enable especially thick photoresist coatings (>/=20 mu m) to be dried in an optimum manner over a short period of time. The photoresist mask that is subsequently produced has a high resolution.

IPC 1-7 (main, further and additional classification)

H01L 21/00

IPC 8 full level (invention and additional information)

F26B 3/30 (2006.01); F26B 25/00 (2006.01); H01L 21/00 (2006.01); H01L 21/027 (2006.01)

CPC (invention and additional information)

H01L 21/67248 (2013.01); H01L 21/67115 (2013.01)

Designated contracting state (EPC)

AT BE CH DE FR GB IT LI NL

EPO simple patent family

WO 9959191 A2 19991118; WO 9959191 A3 20010823; DE 19821237 C1 20000302; EP 1145284 A2 20011017; EP 1145284 A3 20020911; JP 2002515646 A 20020528

INPADOC legal status


2006-02-15 [18D] APPLICATION DEEMED TO BE WITHDRAWN

- Effective date: 20050816

2005-03-23 [17Q] FIRST EXAMINATION REPORT

- Effective date: 20050203

2003-11-19 [RAP1] TRANSFER OF RIGHTS OF AN APPLICATION

- Owner name: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DERANGEWAND

2002-09-11 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A3

- Designated State(s): AT BE CH DE FR GB IT LI NL

2001-10-17 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20001110

2001-10-17 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A2

- Designated State(s): AT BE CH DE FR GB IT LI NL

2001-10-17 [XX] MISCELLANEOUS:

- Free text: DERZEIT SIND DIE WIPO-PUBLIKATIONSDATEN A3 NICHT VERFUEGBAR.