EP 1145291 A1 20011017 - DEVICE FOR PROCESSING SUBSTRATES
Title (en)
DEVICE FOR PROCESSING SUBSTRATES
Title (de)
VORRICHTUNG ZUM BEHANDELN VON SUBSTRATEN
Title (fr)
DISPOSITIF DE TRAITEMENT DE SUBSTRATS
Publication
Application
Priority
- DE 19859468 A 19981222
- EP 9909450 W 19991203
Abstract (en)
[origin: DE19859468A1] A device (1) for processing substrates (2) in a liquid container (3) comprising a receiving device (4, 68, 88) that can be placed above the liquid container (3) and provided with at least one pair of lateral guiding elements (35, 36; 55, 56; 75, 76). Different sized substrates can be received by virtue of the fact that the guiding elements (35, 36; 55, 56; 75, 76) can move in relation to each other.
IPC 1-7
IPC 8 full level
H01L 21/677 (2006.01); H01L 21/00 (2006.01); H01L 21/673 (2006.01)
CPC (source: EP KR)
H01L 21/304 (2013.01 - KR); H01L 21/67028 (2013.01 - EP); H01L 21/67313 (2013.01 - EP)
Citation (search report)
See references of WO 0038221A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
DE 19859468 A1 20000706; DE 19859468 C2 20020117; CN 1331839 A 20020116; EP 1145291 A1 20011017; JP 2002533921 A 20021008; KR 20010089696 A 20011008; TW 463262 B 20011111; WO 0038221 A1 20000629
DOCDB simple family (application)
DE 19859468 A 19981222; CN 99814921 A 19991203; EP 9909450 W 19991203; EP 99961055 A 19991203; JP 2000590200 A 19991203; KR 20017008056 A 20010622; TW 88121541 A 19991209